journal article·1998-03-01

Two-dimensional nanometer-scale calibration based on one-dimensional gratings

J. Garnaes, L. Nielsen, K. Dirscherl, J.F. Jørgensen, J.B. Rasmussen, P.E. Lindelof, C.B. Sørensen

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OpenAlex topics: Advanced Measurement and Metrology Techniques · Optical measurement and interference techniques · Optical Coatings and Gratings

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