Transient pressure induced by laser ablation of liquid toluene: toward the understanding of laser-induced backside wet etching

To clarify the initial stage of laser-induced backside wet etching, we directly measured transient pressure upon laser ablation of toluene under KrF excimer laser irradiation by using a fast-response pressure gauge. The propagation time of the pressure peak to the gauge agreed well with the time for the shock wave to reach the gauge on time-resolved images. The peak pressure P decreased slowly with increasing distance d: P=30.4 MPa for d=100 μm to P=11.1 MPa for d=1000 μm at a fluence F=1.0 J cm-2 pulse-1. The initial pressure, estimated to be of the order of 10–200 MPa, impinges on a transparent plate and contributes to the etching.