DataVXApplied Physics A: Materials Science & ProcessingPaper
journal article·1999-12-01Open access

A comparison of ns and ps steam laser cleaning of Si surfaces

M. Mosbacher, N. Chaoui, J. Siegel, V. Dobler, J. Solis, J. Boneberg, C.N. Afonso, P. Leiderer

Applied Physics A: Materials Science & Processing· Volume 69· Issue 7
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OpenAlex topics: Laser Material Processing Techniques · Ocular and Laser Science Research · Laser Design and Applications

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