The size dependence of the nano-dots formed by electron-beam-induced deposition on the partial pressure of the precursor

We have successfully fabricated nano-dots containing W from a metal–organic gas source by electron-beam-induced deposition in an ultra-high vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size is less than 2 nm in diameter, which is the record smallest ever made by this method.