journal article·1980-04

Angular distribution and differential sputtering yields for low-energy light-ion irradiation of polycrystalline nickel and tungsten

H. L. Bay, J. Bohdansky, W. O. Hofer, J. Roth

Applied Physics· Volume 21· Issue 4
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Research context

OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Metal and Thin Film Mechanics

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References (25)

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