The emission of neutral clusters in sputtering
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Ion-surface interactions and analysis · Semiconductor materials and interfaces · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (87)
Show source-provided references
1. R. Behrisch (ed.):Sputtering by Particle Bombardment, Vols. I, II, and III (Springer, Berlin, Heidelberg 1981, 1983, 1989)
2. W.O. Hofer: Nucl. Instrum. Methods170, 275 (1980)10.1016/0029-554X(80)91026-5 ↗
3. See, for example, W.O. Hofer, in [1]
4. A. Benninghoven, F.G. R�denauer, H.W. Werner:Secondary Ion Mass Spectrometry (Wiley, New York 1987)
5. R.F.K. Herzog, W.P. Poschenrieder, F.G. R�denauer, F.G. Satkiewicz: In Proc. 15th Ann. Conf. Mass Spectrom., Denver, 1967, p. 301
6. G. Blaise, G. Slodzian: C.R. Acad. Sci. (Paris) B266, 1525 (1968)
7. G. Hortig, M. M�ller: Z. Phys.221, 119 (1969)10.1007/BF01392136 ↗
8. G. Staudenmaier: Radiat. Eff.13, 243 (1972)10.1080/00337577208231164 ↗
9. R.F.K. Herzog, W.P. Poschenrieder, F.G. Satiewicz: Radiat. Eff.18, 199 (1973)10.1080/00337577308232122 ↗
10. K. Wittmaack: Phys. Lett.69A, 322 (1979)10.1016/0375-9601(79)90421-3 ↗
11. I. Katakuse, T. Ichihara, Y. Fujita, T. Matsuo, T. Sakurai, H. Matsuda: Int. J. Mass Spectrom. Ion Proc.67, 229 (1985)10.1016/0168-1176(85)80021-5 ↗
12. W. Begemann, K.H. Meiwes-Broer, H.O. Lutz: Phys. Rev. Lett.56, 2248 (1986)10.1103/PhysRevLett.56.2248 ↗
13. H. Oechsner: InThin Film and Depth Profile Analysis, ed. by H. Oechsner (Springer, Berlin, Heidelberg 1984) p. 6310.1007/978-3-642-46499-7_4 ↗
14. R. Honig: J. Appl. Phys.29, 549 (1958)10.1063/1.1723219 ↗
15. H. Oechsner, L. Reichert: Phys. Lett.23, 90 (1966)10.1016/0031-9163(66)90273-3 ↗
16. H. Oechsner, W. Gerhard: Phys. Lett.40A, 211 (1972); Surf. Sci.44, 480 (1974)10.1016/0375-9601(72)90660-3 ↗
17. W. Gerhard, H. Oechsner: Z. Phys. B22, 41 (1975)
18. F. Bernhardt, H. Oechsner, E. Stumpe: Nucl. Instrum. Methods132, 329 (1976)10.1016/0029-554X(76)90754-0 ↗
19. M. Szymonski, H. Overeijnder, A.E. de Vries: Radiat. Eff.36, 189 (1978)10.1080/00337577808240847 ↗
20. C.B. Cooper, J.R. Woodyard: Phys. Lett.79A, 124 (1980)10.1016/0375-9601(80)90338-2 ↗
21. R. Pedrys, R.A. Haring, A. Haring, F.W. Saris, A.E. de Vries: Phys. Lett.82A, 371 (1981)10.1016/0375-9601(81)90920-8 ↗
22. R.A. Haring, R. Pedrys, A. Haring, A.E. de Vries: Nucl. Instrum. Methods B4, 40 (1984)10.1016/0168-583X(84)90041-7 ↗
23. C.B. Cooper, H.A. Hamed: Surf. Sci.143, 215 (1984)10.1016/0039-6028(84)90420-5 ↗
24. P. Fayet, J.P. Wolf, L. W�ste: Phys. Rev. B33, 6792 (1986)10.1103/PhysRevB.33.6792 ↗
25. R. de Jonge, T. Baller, M.G. Tenner, A.E. de Vries, K. Snowdon: Europhys. Lett.2, 449 (1986)10.1209/0295-5075/2/6/007 ↗
26. J. Dembowski: Doctoral Thesis, University of Kaiserslautern (1986)
27. J. Dembowski, H. Oechsner, Y. Yamamura, M. Urbassek: Nucl. Instrum. Methods B18, 464 (1987)
28. W.O. Hofer, H. Gnaser: Nucl. Instrum. Methods B18, 605 (1987)
29. A.E. de Vries: Nucl. Instrum. Methods B27, 173 (1987)10.1016/0168-583X(87)90018-8 ↗
30. H. Gnaser, J. Fleischhauer, W.O. Hofer: Appl. Phys. A37, 211 (1985)10.1007/BF00614819 ↗
31. F.G. R�denauer: Vacuum22, 609 (1972)10.1016/0042-207X(72)90036-X ↗
32. F. Thum, W.O. Hofer: Surf. Sci.90, 331 (1979)10.1016/0039-6028(79)90347-9 ↗
33. H. Rodriguez-Murcia, H.E. Beske: InAdv. Mass Spectrom., Vol. 7, ed. by N.R. Daly (Heyden, London 1978) p. 593.
34. W. Ens, R. Beavis, K.G. Standing: Phys. Rev. Lett.50, 27 (1983)10.1103/PhysRevLett.50.27 ↗
35. D.M. Wood: Phys. Rev. Lett.46, 749 (1981)10.1103/PhysRevLett.46.749 ↗
36. W.A. Saunders, K. Clemenger, W.A. de Heer, W.D. Knight: Phys. Rev. B32, 1366 (1985)10.1103/PhysRevB.32.1366 ↗
37. J.L. Martins, J. Buffet, R. Car: Phys. Rev. B31, 1804 (1985)10.1103/PhysRevB.31.1804 ↗
38. A. Kaldor, D.M. Cox, D.J. Trevor, M.R. Zakin: Z. Phys. D3, 195 (1986)
39. G.P. K�nnen, A. Tip, A.E. de Vries: Radiat. Eff.21, 269 (1974);26, 23 (1975)10.1080/00337577408232416 ↗
40. W. Gerhard: Z. Phys.B 22, 31 (1975)10.1007/PL00020765 ↗
41. I.S. Bitenskii, E.S. Parilis: Sov. Phys. Tech. Phys.23, 1104 (1978)
42. K. Snowdon, R. Hentschke, W. Heiland, P. Hertel: Z. Phys. A318, 261 (1984)10.1007/BF01418083 ↗
43. H.M. Urbassek: Nucl. Instrum. Methods B18, 587 (1987);B31, 541 (1988)
44. P. Sigmund, H.M. Urbassek, D. Matragrano: Nucl. Instrum. Methods B14, 495 (1986)10.1016/0168-583X(86)90145-X ↗
45. D.E. Harrison, C.B. Delaplain: J. Appl. Phys.47, 2252 (1976)10.1063/1.323014 ↗
46. N. Winograd, D.E. Harrison, B.J. Garrison: Surf. Sci.78, 467 (1978)10.1016/0039-6028(78)90092-4 ↗
47. B.J. Garrison, N. Winograd, D.E. Harrison: J. Chem. Phys.69, 1440 (1978)10.1063/1.436767 ↗
48. H.H. Andersen: Nucl. Instrum. Methods B18, 321 (1987)
49. N. Winograd, K.E. Foley, B.J. Garrison, D.E. Harrison: Phys. Lett.73A, 253 (1979)10.1016/0375-9601(79)90724-2 ↗
50. H. Oechsner: InSecondary Ion Mass Spectrometry SIMS III, ed. by A. Benninghoven et al. (Springer, Berlin, Heidelberg 1982) p. 10610.1007/978-3-642-88152-7_18 ↗
51. R. Kelly: Radiat. Eff.80, 273 (1984)10.1080/00337578408216469 ↗
52. A.A. Radzig, B.M. Smirnov:Reference Data on Atoms, Molecules, and Ions (Springer, Berlin, Heidelberg 1984)
53. P. Sigmund: InInelastic Ion-Surface Collisions, ed. by N.H. Tolk et al. (Academic, New York 1977) p. 12110.1016/B978-0-12-703550-5.50011-X ↗
54. W. Eckstein: Nucl. Instrum. MethodsB 33, 489 (1988)10.1016/0168-583X(88)90614-3 ↗
55. G. Holmen: Radiat. Eff.24, 7 (1975)10.1080/00337577508239471 ↗
56. Kh. Zommerfel'dt, E.S. Mashkova, V.A. Molchanov: Sov. Phys. Dokl.14, 901 (1970)
57. H. Sommerfeldt, E.S. Mashkova, V.A. Molchanov: Phys. Lett.38A, 237 (1972)10.1016/0375-9601(72)90059-X ↗
58. R.J. MacDonald: Phys. Lett.29A, 256 (1969); Philos. Mag.21, 519 (1970); Radiat. Eff.3, 131 (1970)10.1016/0375-9601(69)90368-5 ↗
59. H.E. Roosendaal: In [1], p. 21910.1007/3540105212_10 ↗
60. C. Feldman, F.G. Satkiewicz: J. Electrochem. Soc.120, 1111 (1973)10.1149/1.2403640 ↗
61. R.A. Haring, H.E. Roosendaal, P.C. Zalm: Nucl. Instrum. Methods B28, 205 (1987)10.1016/0168-583X(87)90106-6 ↗
62. K. Snowdon: Nucl. Instrum. Methods B9, 132 (1985)10.1016/0168-583X(85)90676-7 ↗
63. G.K. Wehner: J. Appl. Phys.26, 1056 (1955); Phys. Rev.102, 690 (1956)10.1063/1.1722136 ↗
64. R.H. Silsbee: J. Appl. Phys.28, 1246 (1957)10.1063/1.1722626 ↗
65. R.G. Musket, H.P. Smith: J. Appl. Phys.39, 3579 (1968)10.1063/1.1656828 ↗
66. C. Lehmann, P. Sigmund: Phys. Stat. Solidi16, 507 (1966)10.1002/pssb.19660160216 ↗
67. D.E. Harrison, N.S. Levy, J.P. Johnson, H.M. Effron: J. Appl. Phys.39, 3742 (1968)10.1063/1.1656850 ↗
68. Y. Yamamura, W. Takeuchi: Nucl. Instrum. Methods B29, 461 (1987)
69. W. Eckstein, M. Hou: Nucl. Instrum. Methods B31, 386 (1988)10.1016/0168-583X(88)90336-9 ↗
70. M. Hautala, J. Likonen: Nucl. Instrum. Methods B33, 526 (1988)10.1016/0168-583X(88)90622-2 ↗
71. G. Staudenmaier: Radiat. Eff.18, 181 (1973)10.1080/00337577308232119 ↗
72. S.P. Holland, B.J. Garrison, N. Winograd: Phys. Rev. Lett.44, 756 (1980)10.1103/PhysRevLett.44.756 ↗
73. E. Bauer, S. Prigge: InSIMS III, ed. by A. Benninghoven et al. (Springer, Berlin, Heidelberg 1982) p. 201
74. J.J.P. Elich, H.E. Roosendaal, D. Onderdelinden: Radiat. Eff.14, 93 (1972)10.1080/00337577208230477 ↗
75. D. Onderdelinden: Appl. Phys. Lett.8, 189 (1966); Can. J. Phys.46, 739 (1968)10.1063/1.1754548 ↗
76. C.H. Weijsenfeld: Thesis, University of Utrecht (1966)
77. M.T. Robinson, A.L. Southern: J. Appl. Phys.38, 2969 (1967)10.1063/1.1710034 ↗
78. J.P. Baxter, G.A. Schick, J. Singh, P.H. Kobrin, N. Winograd: J. Vac. Sci. Technol. A4, 1218 (1986)10.1116/1.573401 ↗
79. N. Winograd, P.H. Kobrin, G.A. Schick, J. Singh, J.P. Baxter, B.J. Garrison: Surf. Sci.176, L817 (1986)10.1016/0039-6028(86)90155-X ↗
80. B.J. Garrison, C.T. Reimann, N. Winograd, D.E. Harrison: Phys. Rev. B36, 3516 (1987)10.1103/PhysRevB.36.3516 ↗
81. M.W. Thompson: Phys. Rep.69, 335 (1981)10.1016/0370-1573(81)90106-X ↗
82. I. Reid, M.W. Thompson, B.W. Farmery: Philos. Mag. A42, 151 (1980)10.1080/01418618009365807 ↗
83. S. Ahmad, B.W. Farmery, M.W. Thompson: Philos. Mag. A44, 1383 (1981)10.1080/01418618108235817 ↗
84. R.S. Nelson, M.W. Thompson: Proc. R. Soc. (London) A259, 458 (1961)10.1098/rspa.1961.0003 ↗
85. W. Szymczak, K. Wittmaack: Nucl. Instrum. Methods194, 561 (1982)10.1016/0029-554X(82)90581-X ↗
86. J. Linders, H. Niedrig, M. Sternberg: Nucl. Instrum. Methods B2, 649 (1984)10.1016/0168-583X(84)90285-4 ↗
87. M.T. Robinson: In [1], p. 7310.1007/3540105212_8 ↗