DataVXApplied Physics APaper
journal article·2025-05

Investigating the effect of diaphragm cut pattern on overall sensitivity and pressure range of piezoresistive pressure sensor

Kasra Abedi, Reza Ansari, Mojtaba Haghgoo, Mohammad Kazem Hassanzadeh-Aghdam

Applied Physics A· Volume 131· Issue 5
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OpenAlex topics: Advanced MEMS and NEMS Technologies · Advanced Sensor Technologies Research · Advanced Sensor and Energy Harvesting Materials

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References (56)

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