Surface structuring of fused silica by an ultrashort pulse burst with THz repetition rates
Source abstract
Abstract
We report a type of sub-micron structure observed on the surface of fused silica generated by a sequence of ultrashort laser pulses (“pulse burst”) that have pulse-to-pulse time interval (“delay”) in the range of 300 fs to 10 ps (corresponding to pulse-to-pulse repetition rates 3.3–0.1 THz). These structures consist of round and slightly elliptical craters with diameters from 50 nm to a few hundred nm within a 5-μm focal spot. A comparison experiment is performed with low-defect silicon samples that do not show such structures. Therefore, we attribute the formation of these structures to surface defects that act as precursors for laser damage.
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Research context
OpenAlex topics: Laser Material Processing Techniques · Laser-induced spectroscopy and plasma · Integrated Circuits and Semiconductor Failure Analysis
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References (24)
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