Nanostructuring of ITO thin films through femtosecond laser ablation
Source abstract
Abstract
Due to reduced thermal effects, tightly focused femtosecond laser beams can yield submicron resolution with minimal side effects. In laser direct writing applications, diffraction-free nature of the Bessel beams relaxes alignment of the sample and shortens the production time. Micron-sized central spots and long depth of focused beams can be simultaneously produced. We apply fs Bessel beam single-pulse ablation method to transparent conductive oxide films. We use laser of 1030 nm wavelength and two different axicons (base angles are 25° and 40°). Fabricated structures are characterized by optical microscope, atomic force microscope and scanning electron microscope. Laser beam shaping and virtues of non-diffracted Bessel beams provide periodic structures for scribing in the solar cells or high-resolution displays and reduce the process time.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Laser Material Processing Techniques · Laser-induced spectroscopy and plasma · Laser-Ablation Synthesis of Nanoparticles
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (31)
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1. S.-F. Tseng, W.-T. Hsiao, K.-C. Huang, D. Chiang, M.-F. Chen, C.-P. Chou, Laser scribing of indium tin oxide (ITO) thin films deposited on various substrates for touch panels. Appl. Surf. Sci. 257(5), 1487–1494 (2010)10.1016/j.apsusc.2010.08.080 ↗
2. Z. Kuang, W. Perrie, D. Liu, P. Fitzsimons, S.P. Edwardson, E. Fearon, G. Dearden, K.G. Watkins, Ultrashort pulse laser patterning of indium tin oxide thin films on glass by uniform diffractive beam patterns. Appl. Surf. Sci. 258(19), 7601–7606 (2012)10.1016/j.apsusc.2012.04.099 ↗
3. C.-F.J. Kuo, H.Q. Vu, D. Gunawan, W.-L. Lan, Multi-objective optimization of laser-scribed micro grooves on AZO conductive thin film using data envelopment analysis. Opt. Laser Technol. 44(6), 1959–1970 (2012)10.1016/j.optlastec.2012.01.030 ↗
4. M.W. Rowell, M.D. McGehee, Transparent electrode requirements for thin film solar cell modules. Energy Environ. Sci. 4(1), 131–134 (2011)10.1039/C0EE00373E ↗
5. L. Zhao, Y.H. Zuo, C.L. Zhou, H.L. Li, H.W. Diao, W.J. Wang, A highly efficient light-trapping structure for thin-film silicon solar cells. Solar Energy 84(1), 110–115 (2010)10.1016/j.solener.2009.10.014 ↗
6. F.F. Ngaffo, A.P. Caricato, M. Femandez, M. Martino, F. Romano, Structural properties of single and multilayer ITO and TiO2 films deposited by reactive pulsed laser ablation deposition technique. Appl. Surf. Sci. 253(15,SI), 6508–6511 (2007)10.1016/j.apsusc.2007.01.110 ↗
7. S. Venkat, C. Dunsky, Laser patterning of ITO in flat panel display manufacturing—art. no. 610602 6106 (2006) 10602, Conference on photon processing in microelectronics and photonics V, San Jose, 23–26 Jan (2006)10.1117/12.653598 ↗
8. T. Minami, Present status of transparent conducting oxide ing oxide thin-film development for indium-tin-oxide (ITO) substitutes. Thin Solid Films 516(17), 5822–5828 (2008)10.1016/j.tsf.2007.10.063 ↗
9. V.L. Calil, C. Legnani, G.F. Moreira, C. Vilani, K.C. Teixeira, W.G. Quirino, R. Machado, C.A. Achete, M. Cremona, Transparent thermally stable poly(etherimide) film as flexible substrate for OLEDs. Thin Solid Films 518(5), 1419–1423 (2009)10.1016/j.tsf.2009.09.055 ↗
10. O. Yavas, M. Takai, Effect of substrate absorption on the efficiency of laser patterning of indium tin oxide thin films. J. Appl. Phys. 85(8,1), 4207–4212 (1999)10.1063/1.370332 ↗
11. M.-F. Chen, Y.-P. Chen, W.-T. Hsiao, Z.-P. Gu, Laser direct write patterning technique of indium tin oxide film. Thin Solid Films 515(24), 8515–8518 (2007)10.1016/j.tsf.2007.03.172 ↗
12. C.-F.J. Kuo, S.-W. Liang, H.-M. Tu, Optimization parameters of femtosecond laser isolation processing for a microcrystalline silicon thin film solar cell. Mater. Manuf. Process. 26(10), 1310–1318 (2011)10.1080/10426914.2011.551958 ↗
13. Q. Bian, X. Yu, B. Zhao, Z. Chang, S. Lei, Femtosecond laser ablation of indium tin-oxide narrow grooves for thin film solar cells. Opt. Laser Technol. 45, 395–401 (2013)10.1016/j.optlastec.2012.06.018 ↗
14. G. Raciukaitis, M. Brikas, M. Gedvilas, T. Rakickas, Patterning of indium-tin oxide on glass with picosecond lasers. Appl. Surf. Sci. 253(15,SI), 6570–6574 (2007)10.1016/j.apsusc.2007.01.099 ↗
15. H.W. Choi, D.F. Farson, J. Bovatsek, A. Arai, D. Ashkenasi, Direct-write patterning of indium-tin-oxide film by high pulse repetition frequency femtosecond laser ablation. Appl. Opt. 46(23), 5792–5799 (2007)10.1364/AO.46.005792 ↗
16. S. Krause, P.T. Miclea, F. Steudel, S. Schweizer, G. Seifert, Precise microstructuring of indium-tin oxide thin films on glass by selective femtosecond laser ablation. EPJ Photovolt. 4, 40601 (2013)10.1051/epjpv/2012013 ↗
17. P. Gecys, G. Raciukaitis, E. Miltenis, A. Braun, S. Ragnow, Scribing of thin-film solar cells with picosecond laser pulses, in Lasers in Manufacturing 2011: Proceedings of The Sixth International WLT Conference on Lasers in Manufacturing, Vol 12, PT B, Vol. 12 of Physics Procedia, ed. by M. Schmidt, M.F. Zaeh, T. Graf, A. Ostendorf (German Sci Laser Soc (WLT), 2011), pp. 141–14810.1016/j.phpro.2011.03.116 ↗
18. J. Durnin, J. Miceli, J. Eberly, Diffraction-free beams. Phys. Rev. Lett. 58(15), 1499–1501 (1987)10.1103/PhysRevLett.58.1499 ↗
19. J. Turunen, A. Vasara, A. Friberg, Holographic generation of diffraction-free beams. Appl. Opt. 27(19), 3959–3962 (1988)10.1364/AO.27.003959 ↗
20. A. Vasara, J. Turunen, A. Friberg, Realization of general nondiffracting beams with computer-generated holograms. J. Opt. Soc. Am. A Opt. Image Sci. Vis. 6(11), 1748–1754 (1989)10.1364/JOSAA.6.001748 ↗
21. R. Herman, T. Wiggins, Production and uses of diffractionless beams. J. Opt. Soc. Am. A Opt. Image Sci. Vis. 8(6), 932–942 (1991)10.1364/JOSAA.8.000932 ↗
22. J. Arlt, K. Dholakia, Generation of high-order Bessel beams by use of an axicon. Opt. Commun. 177(1–6), 297–301 (2000)10.1016/S0030-4018(00)00572-1 ↗
23. R. Sahin, Y. Morova, E. Simsek, S. Akturk, Bessel-beam-written nanoslit arrays and characterization of their optical response. Appl. Phys. Lett. 102(19), 193106 (2013)10.1063/1.4805358 ↗
24. R. Sahin, E. Simsek, S. Akturk, Nanoscale patterning of graphene through femtosecond laser ablation. Appl. Phys. Lett. 104(5), 053118 (2014)10.1063/1.4864616 ↗
25. B. Wetzel, C. Xie, P.-A. Lacourt, J.M. Dudley, F. Courvoisier, Femtosecond laser fabrication of micro and nano-disks in single layer graphene using vortex Bessel beams. Appl. Phys. Lett. 103(24), 241111 (2013)10.1063/1.4846415 ↗
26. F. Courvoisier, J. Zhang, M.K. Bhuyan, M. Jacquot, J.M. Dudley, Applications of femtosecond Bessel beams to laser ablation. Appl. Phys. A Mater. Sci. Process. 112(1), 29–34 (2013)10.1007/s00339-012-7201-2 ↗
27. A. Michalowski, C. Freitag, R. Weber, T. Graf, Laser surface structuring with long depth of focus. Proc. SPIE 7920, 79200–79200 (2011)10.1117/12.881189 ↗
28. M. Kohno, Y. Matsuoka, Microfabrication and drilling using diffraction-free pulsed laser beam generated with axicon lens. JSME Int. J. Ser. B Fluids Therm. Eng. 47(3), 497–500 (2004)10.1299/jsmeb.47.497 ↗
29. S. Akturk, C.L. Arnold, B. Prade, A. Mysyrowicz, Generation of high quality tunable Bessel beams using a liquid-immersion axicon. Opt. Commun. 282(16), 3206–3209 (2009)10.1016/j.optcom.2009.05.026 ↗
30. S. A. Fernandes, B. Schoeps, K. Kowalick, R. Nett, C. Esen, M. Pickshaus, A. Ostendorf, Femtosecond laser ablation of ITO/ZnO for thin film solar cells, in Lasers in Manufacturing (LIM 2013), Vol. 41 of Physics Procedia, German Sci Laser Soc (WLT); Hamburg Univ Technol (TUHH), Inst Laser & Syst Technologies (ILAS); Ruhr Univ Bochum (RUB), Appl Laser Technol (LAT); Tech Univ Hamburg Harburg (TUHH); Ruhr Univ Bochum (RUB), ed. by C. Emmelmann, M. F. Zaeh, T. Graf, M. Schmidt (2013), pp. 795–802
31. A. Ben-Yakar, R. Byer, Femtosecond laser ablation properties of borosilicate glass. J. Appl. Phys. 96(9), 5316–5323 (2004)10.1063/1.1787145 ↗