journal article·2015-03

Femtosecond laser fabricating black silicon in alkaline solution

Jiao Meng, Haiying Song, Xiaoli Li, Shibing Liu

Applied Physics A· Volume 118· Issue 4
Publisher page

Abstract

An efficient approach for enhancing the surface antireflection is proposed, in which a black silicon is fabricated by a femtosecond laser in alkaline solution. In the experiment, 2 wt% NaOH solution is formulated at room temperature (22 ± 1 °C). Then, a polished silicon is scanned via femtosecond laser irradiation in 2 wt% NaOH solution. Jungle-like microstructures on the black silicon surface are characterized using an atomic force microscopy. The reflectance of the black silicon is measured at the wavelengths ranging from 400 to 750 nm. Compared to the polished silicon, the black silicon can significantly suppress the optical reflection throughout the visible region (<5 %). Meanwhile, we also investigated the factors of the black silicon, including the femtosecond laser pulse energy and the scanning speed. This method is simple and effective to acquire the black silicon, which probably has a large advantage in fast and cost-effective black silicon fabrication.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Laser Material Processing Techniques · Silicon Nanostructures and Photoluminescence · Advanced Surface Polishing Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (30)

Show source-provided references
1. C.K. Chan, H.L. Peng et al., High-performance lithium battery anodes using silicon nanowires. Nat. Nanotechnol. 3(1), 31–35 (2008)10.1038/nnano.2007.411 ↗
2. S.W. Boettcher, J.M. Spurgeon, M.C. Putnam et al., Energy-conversion properties of vapor-liquid-solid-srown silicon wire-array photocathodes. Science 327(5962), 185–187 (2010)10.1126/science.1180783 ↗
3. T.H. Her, R.J. Finlay, C. Wu et al., Microstructuring of silicon with femtosecond laser pulses. Appl. Phys. Lett. 73(12), 1673–1675 (1998)10.1063/1.122241 ↗
4. C. Wu, C.H. Croueh, L. Zhao et al., Near-unity below-band-gap absorption by microstructured silicon. Appl. Phys. Lett. 78(13), 1850–1852 (2001)10.1063/1.1358846 ↗
5. L.L. Ma, Y.C. Zhou, N. Jiang, X. Lu, J. Shao, W. Lu, J. Ge, X.M. Ding, X.Y. Hou, Wide-band “black silicon” based on porous silicon. Appl. Phys. Lett. 88, 171907 (2006)10.1063/1.2199593 ↗
6. S. Koynov, M.S. Brandt, M. Stutzmann, Black nonreflecting silicon surfaces for solar cells. Appl. Phys. Lett. 88, 203107 (2006)10.1063/1.2204573 ↗
7. H.M. Branz, V.E. Yost, S. Ward, K.M. Jones, B. To, P. Stradins, Nanostructured black silicon and the optical reflectance of graded-density surfaces. Appl. Phys. Lett. 94, 231121 (2006)10.1063/1.3152244 ↗
8. Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C.-H. Hsu, Y.-H. Chang, C.-S. Lee, K.-H. Chen, L.-C. Chen, Improved broadband and quasiomnidirectional anti-reflection properties with biomimetic silicon nanostructures. Nat. Nanotechnol. 2, 770–774 (2007)10.1038/nnano.2007.389 ↗
9. S.H. Zaidi, D.S. Ruby, J.M. Gee, Characterization of random reactive ion etched-textured silicon solar cells. IEEE Trans. Electron Devices 48, 1200–1206 (2001)10.1109/16.925248 ↗
10. C. Lee, S.Y. Bae, S. Mobasser, H. Manohara, A novel silicon nanotips antireflection surface for the micro sun sensor. Nano Lett. 5, 2438–2442 (2005)10.1021/nl0517161 ↗
11. M.A. Sheehy, L. Winston, J.E. Carey, C.M. Friend, E. Mazur et al., Role of the background gas in the morphology and optical properties of laser-microstructured silicon. Chem. Mater. 17, 358223586 (2005)10.1021/cm049029i ↗
12. C. Wang et al., Black silicon created by interfered femtosecond laser illumination (International Society for Optics and Photonics, Bellingham, Washington, 2012)10.1117/12.932230 ↗
13. R. Younkin, J.E. Carey, E. Mazur et al., Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond laser pulses. J. Appl. Phys. 93(5), 2626–2629 (2003)10.1063/1.1545159 ↗
14. A.Y. Vorobyev, C. Guo, Direct creation of black silicon using femtosecond laser pulses. Appl. Surf. Sci. 257, 7291–7294 (2011)10.1016/j.apsusc.2011.03.106 ↗
15. G. Daminelli, J. Krüger, W. Kautek, Femtosecond laser interaction with silicon under water confinement. Thin Solid Films 467(1–2), 334–341 (2004)10.1016/j.tsf.2004.04.043 ↗
16. Z. Ming, S. Weifeng, Z. Li, Microstructured silicon—a new type of opto-electronic material 32(7) (2003)
17. Y. Jiang, R. Qing, H. Yang, C. Chen, H. Ma, F. Chang, Alkali-treated Si nano wire array for improving solar cell performance. Appl. Phys. A 113, 13–17 (2013)10.1007/s00339-013-7846-5 ↗
18. J. Yurong, Q. Ruiping, B. Changxian, Texturing of silicon nanowire arrays by post-treatment in alkali solution. Acta Optica Sinica 32(8), 0816002 (2012)10.3788/AOS201232.0816002 ↗
19. K.Q. Peng, Y. Xu, Y. Wu et al., Aligned single-crystalline Si nano wire arrays for photovoltaic applications. Small 1(11), 1062–1067 (2005)10.1002/smll.200500137 ↗
20. S. Koynov, M.S. Brandt, M. Stutzmann, Black nonreflecting silicon surface for solar cells. Appl. Phys. Lett. 88(20), 203107 (2006)10.1063/1.2204573 ↗
21. S. Koynov, M.S. Brandt, M. Stutzmann, Black multi-crystalline silicon solar cells. Rapid Research Letters. 1(2), 53–55 (2007)
22. H.M. Branz, V.E. Yost, S. Ward et al., Nanostructured black silicon and the optical reflectance of graded-density surfaces. Appl. Phys. Lett. 94(23), 231121 (2009)10.1063/1.3152244 ↗
23. H.C. Yuan, V.E. Yost, M.R. Page et al., Efficient black silicon solar cell with a density- graded nanoporous surface: optical properties, performance limitations, and design rules. Appl. Phys. Lett. 95(12), 123501 (2009)10.1063/1.3231438 ↗
24. P. Qid, N. Lu, H.B. Xu et al., Simple approach to wafer-scale self-cleaning antireflective silicon surface. Langmuir 25(14), 7769–7772 (2009)10.1021/la9013009 ↗
25. J.C. Bailar, Comprehensive Inorganic Chemistry. Vol. l, Pergaman Press, 1409–12 (1973)
26. P.S. Roller, G. Evrin, The association of silicate ion in dilute alkaline solution. J. Am. Soc. 62, 461–471 (1940)10.1021/ja01860a001 ↗
27. A. Merlos, M.C. Acero, M.H. Bao et al., A study of the undercutting characteristics in the TMAH-IPA system. Micromech. Microeng. 2(3), 181–183 (1992)10.1088/0960-1317/2/3/014 ↗
28. C.R. Tellier, A.R. Charbonnieras, Characterization of the anisotropic chemical attack of silicon plates in TMAH 25 % solution: micromachining and adequacy of the dissolution slowness surface. Sens. Actuators A. 105(1), 62–75 (2003)10.1016/S0924-4247(03)00064-5 ↗
29. S. Koynov, M.S. Brandt, M. Stutzmann, Black nonreflecting silicon surfaces for solar cells. Appl. Phys. Lett. 88(20), 203107 (2006)10.1063/1.2204573 ↗
30. W. Wu, J. Xu, H. Chen, Simulation of optical model base on micro-cones structure of black silicon. Chin. J. Lasers 38(6), 0603029 (2011)10.3788/CJL201138.0603029 ↗