Effect of prepulse laser wavelength on EUV emission from CO2 reheated laser-produced Sn plasma
Source abstract
Abstract
We investigated the role of prepulse laser wavelength on extreme-ultraviolet (EUV) emission and ionic debris generation. A 6 ns Nd:YAG laser operating at 266 nm was used to generate a pre-plasma that was then reheated by a 35 ns CO2 laser pumping pulse at 10.6 μm. At an ideal delay time, improvement in EUV conversion efficiency (CE) of up to 30 % was seen compared to the CE from the pumping pulse alone. It was also shown that the most probable Sn ion kinetic energies were reduced significantly with the use of a prepulse, however, ion fluence increased. These results were compared to those obtained using a 1064 nm prepulse.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Laser-induced spectroscopy and plasma · Atomic and Molecular Physics · Laser-Plasma Interactions and Diagnostics
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References (15)
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