Electromechanical properties of Ba(Ti1-xZrx)O3 thin films
Source abstract
Abstract
The electromechanical properties of thin films of barium titanate zirconate were studied with the help of a double-beam interferometer. Thin films of barium titanate zirconate (Ba(Ti1-xZrx)O3) of various compositions (x=0, 0.03, 0.05, 0.07, 0.1, 0.2, 0.3 and 0.4) were deposited by chemical solution deposition on Pt/TiO2/SiO2/Si substrates. The thin films show a strain of around 0.05 (at 200 kV/cm) for the unsubstituted BaTiO3 thin films. For higher Zr substitutions up to 5% the strain increases slightly and subsequently falls to 0.01 at 200 kV/cm for even higher Zr content. The d33 values were found to vary between 30 pm/V and 10 pm/V for 0≤x≤0.4.
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Research context
OpenAlex topics: Ferroelectric and Piezoelectric Materials · Electronic and Structural Properties of Oxides · Acoustic Wave Resonator Technologies
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References (16)
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