journal article·2009-01

Electrical properties of boron-doped diamond-like carbon thin films deposited by femtosecond pulsed laser ablation

A. Sikora, A. Berkesse, O. Bourgeois, J.-L. Garden, C. Guerret-Piécourt, A.-S. Loir, F. Garrelie, C. Donnet

Applied Physics A· Volume 94· Issue 1
Publisher page

Abstract

We report on electrical measurements and structural characterization performed on boron-doped diamond-like carbon thin films deposited by femtosecond pulsed laser deposition. The resistance has been measured between 77 and 300 K using four probe technique on platinum contacts for different boron doping. Different behaviours of the resistance versus temperature have been evidenced between pure DLC and boron-doped DLC. The a-C:B thin film resistances exhibit Mott variable range hopping signature with temperature. Potential applications of DLC thin films to highly sensitive resistive thermometry is going to be discussed.
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Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Semiconductor materials and devices · Ion-surface interactions and analysis

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References (29)

Show source-provided references
1. J. Robertson, Mat. Sci. Eng. 37, 129 (2002)10.1016/S0927-796X(02)00005-0 ↗
2. E. Staryga, G.W. Bak, Diamond Relat. Mater. 14, 23 (2005)10.1016/j.diamond.2004.06.030 ↗
3. C. Godet, J.-P. Kleider, J. Mater. Sci. Mater. Electron. 14, 413 (2006)10.1007/s10854-006-8088-5 ↗
4. P.N. Vishwakarma, S.V. Subramanyam, J. Appl. Phys. 100, 113702 (2006)10.1063/1.2372585 ↗
5. R. Cabanel, J. Chaussy, J. Geneste, J. Mazuer, J.C. Villégier, Thin Solid Films 185, 145 (1990)10.1016/0040-6090(90)90014-5 ↗
6. F. Fominaya, T. Fournier, P. Gandit, J. Chaussy, Rev. Sci. Instrum. 68, 4191 (1997)10.1063/1.1148366 ↗
7. O. Bourgeois, S. Skipetrov, F. Ong, J. Chaussy, Phys. Rev. Lett. 94, 057007 (2005)10.1103/PhysRevLett.94.057007 ↗
8. D.W. Denlinger, A.N. Abarra, K. Allen, P.W. Rooney, M.T. Messer, S.K. Watson, F. Hellman, Rev. Sci. Instrum. 65, 946 (1994)10.1063/1.1144925 ↗
9. O. Bourgeois, E. André, C. Macovei, J. Chaussy, Rev. Sci. Instrum. 77, 126108 (2006)10.1063/1.2403934 ↗
10. M. Chhowalla, Y. Yin, G.A. Amaratunga, D.R. McKenzie, T. Frauenheim, Appl. Phys. Lett. 69, 2344 (1996)10.1063/1.117519 ↗
11. S. Nekkanty, M.E. Walter, Surf. Coat. Technol. 183, 1 (2004)10.1016/S0257-8972(03)00878-8 ↗
12. Z.Q. Ma, B.X. Liu, Sol. Energy Mater. Sol. Cells 69, 339 (2001)10.1016/S0927-0248(00)00400-1 ↗
13. W. Kautek, S. Pentzien, A. Conradi, J. Krüger, K.W. Brzezinka, Appl. Surf. Sci. 106, 158 (1996)10.1016/S0169-4332(96)00443-6 ↗
14. H.F. Cheng, F.Y. Chuang, C.H. Tsai, W.C. Wang, C.M. Huang, I.N. Lin, Appl. Surf. Sci. 142, 504 (1999)10.1016/S0169-4332(98)00716-8 ↗
15. Y. Suda, Y. Suganuma, Y. Sakai, K. Suzuki, J. Tsujino, N. Homma, Appl. Surf. Sci. 197–198, 603 (2002)10.1016/S0169-4332(02)00405-1 ↗
16. X. Tian, M. Rusop, Y. Hayashi, T. Soga, T. Jimbo, M. Umeno, Jpn. J. Appl. Phys. 41, L970 (2002)10.1143/JJAP.41.L970 ↗
17. X.M. Tian, M. Rusop, Y. Hayashi, T. Soga, T. Jimbo, M. Umeno, Sol. Energy Mater. Sol. Cells 77, 105 (2003)10.1016/S0927-0248(02)00461-0 ↗
18. F. Qian, V. Craciun, , R.K. Singh, S.D. Dutta, P.P. Pronko. J. Appl. Phys. 86, 2281 (1999)10.1063/1.371043 ↗
19. G. Garrelie, A.S. Loir, C. Donnet, F. Rogemond, R. Le Harzic, M. Belin, E. Audouard, P. Laporte, Surf. Coat. Technol. 163–164, 306 (2003)10.1016/S0257-8972(02)00481-4 ↗
20. A.S. Loir, F. Garrelie, C. Donnet, M. Belin, B. Forest, F. Rogemond, P. Laporte, Thin Solid Films 453–454, 531 (2004)10.1016/j.tsf.2003.11.135 ↗
21. S. Eliezer, N. Eliaz, E. Grossman, D. Fisher, I. Gouzman, Z. Henis, S. Pecker, Y. Horovitz, M. Fraenkel, S. Maman, Y. Lereah, Phys. Rev. B 69, 144119 (2004)10.1103/PhysRevB.69.144119 ↗
22. S. Amoruso, G. Ausanio, R. Bruzzese, M. Vitiello, X. Wang, Phys. Rev. B 71, 33406 (2005)10.1103/PhysRevB.71.033406 ↗
23. N. Benchikh, F. Garrelie, C. Donnet, B. Bouchet-Fabre, K. Wolski, F. Rogemond, A.S. Loir, J.L. Subtil, Thin Solid Films 482, 287 (2005)10.1016/j.tsf.2004.11.162 ↗
24. N. Benchikh, F. Garrelie, K. Wolski, C. Donnet, R.Y. Fillit, F. Rogemond, J.L. Subtil, J.N. Rouzaud, J.Y. Laval, Thins Solid Films 494, 98 (2006)10.1016/j.tsf.2005.07.161 ↗
25. N. Benchikh, F. Garrelie, C. Donnet, K. Wolski, R.Y. Fillit, F. Rogemond, J.L. Subtil, J.N. Rouzaud, J.Y. Laval, Surf. Coat. Technol. 200, 6272 (2006)10.1016/j.surfcoat.2005.11.056 ↗
26. P.A. Lee, T.V. Ramakrishnan, Rev. Mod. Phys. 52, 287 (1985)10.1103/RevModPhys.57.287 ↗
27. F. Garrelie, A.S. Loir, F. Goutaland, R. Le Harzic, B. Angleraud, Y. Ouerdane, P. Laporte, SPIE Proc. 4760, 301 (2002)10.1117/12.482098 ↗
28. N. Sbai-Benchikh, Thesis, University Saint-Etienne (2004)
29. P.C. Shan, Z. Celik-Butler, D.P. Butler, A. Jahanzeb, C.M. Travers, W. Kula, R. Sobolewski, J. Appl. Phys. 80, 7118 (1996)10.1063/1.363724 ↗