Fabrication of LiNbO3 thin films by pulsed laser deposition and investigation of nonlinear properties

Thin films of LiNbO3 were deposited by pulsed-laser deposition (PLD). Crystalline and transparent films were deposited on a sapphire substrate at 400 °C, in 100 mTorr of oxygen, with a fluence lower than 1.2 J/cm2. Droplet free films were deposited with low ablation laser fluence by the eclipse method, and waveguide losses were 15.9 dB/cm and 3.1 dB/cm. Subsequently, second-harmonic generation (SHG) was achieved by waveguide mode phase matching. The center wavelength of the matching spectrum was 853 nm, and the full width at half maximum (FWHM) was 19 nm.