High efficiency silicon nitride grating coupler
Source abstract
Abstract
In this paper, we have designed, fabricated and characterized silicon nitride grating couplers with high efficiency at 1490 nm. The devices are fabricated using deep UV photolithography with resolution requirement of ∼500 nm. The grating coupler fabricated yields a peak coupling efficiency of −5.1 dB. The 1-dB bandwidth of the grating coupler is 60 nm.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Photonic and Optical Devices · Mechanical and Optical Resonators · Optical Coatings and Gratings
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References (24)
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