journal article·2004-12

Diffusion-limited photopolymerization in scanning micro-stereolithography

N. Fang, C. Sun, X. Zhang

Applied Physics A· Volume 79· Issue 8
Publisher page

Abstract

The trade-off between process speed and resolution in microstereolithography (μSL) roots on the diffusion-limited kinetics of photopolymerization. Using a numerical model, we have investigated the influence of diffusion dominant effect under high photon flux. Radical depletion turned out to limit the smallest feature achievable to the order of 10 μm under high process speed. A solution of pulsed laser curing is proposed in order to realize sub-micron resolution in high speed μSL process.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Nonlinear Optical Materials Studies · Photopolymerization techniques and applications · Nanofabrication and Lithography Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (18)

Show source-provided references
1. K. Ikuta, K. Hirowatari: Proc. IEEE MEMS’93, 42 (1993)10.1002/j.2161-0045.1993.tb00251.x ↗
2. X. Zhang, X.N. Jiang, C. Sun: Sens. & Act. A 7, 149 (1999)10.1016/S0924-4247(99)00189-2 ↗
3. B.H. Cumpston, S. Ananthavel, S. Barlow, D.L. Dyer, J.E. Ehrlich, L.L. Erskine, A.A. Heikal, S.M. Kuebler, I.-Y.S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S.R. Marder, J.W. Perry: Nature 398, 51 (1999)10.1038/17989 ↗
4. S. Kawata, H.-B. Sun, T. Tanaka, K. Takada: Nature 412, 697 (2001)10.1038/35089130 ↗
5. K. Ikuta, T. Ogata, M. Tsubio, S. Kojima: Proc. IEEE, The Ninth Annual International Workshop on MEMS, New York, 301 (1996)
6. J. Neumann, K.S. Wieking, D. Kip: Appl. Opt. 38, 5418 (1999)10.1364/AO.38.005418 ↗
7. M. Straub, M. Ventura, M. Gu: Phys. Rev. Lett. 91, 043901 (2003)10.1103/PhysRevLett.91.043901 ↗
8. C. Sun: PhD thesis, Pennylvania State University, 2002
9. G.R. Tryson, A.R. Shultz: J. Polym. Sci. B17, 2059 (1979)10.1002/pol.1979.180171202 ↗
10. L. Flach, B. Chartoff: Polym. Eng. & Sci., 35, 483 (1995)10.1002/pen.760350605 ↗
11. M. Buback: Makrom. Chem. 191, 1575 (1990)10.1002/macp.1990.021910710 ↗
12. M. Buback, R.G. Gilbert, G.T. Russell, D.J.T. Hill, G. Moad, K.F. O’Driscoll, J. Shen, M.A. Winnik: J. Polym. Sci. A 30, 851 (1992)10.1002/pola.1992.080300516 ↗
13. M. Xi: Masters Thesis, Pennylvania State University, 2000
14. J. Serbin, A. Egbert, A. Ostendorf, B.N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Frohlich, M. Popall: Opt. Lett. 28, 301 (2003)10.1364/OL.28.000301 ↗
15. I. Wang, M. Bouriau, P.L: Baldeck, C. Martineau, C. Andraud: Opt. Lett. 27, 1348 (2002)
16. S.B. Brown, C.M. Orlando: In: Encyclopedia of Polymer Science and Engineering, 2nd ed., Vol.14 (Wiley-Interscience, New York 1988) pp. 169–189
17. J. Brandrup, E.H. Immergut: Polymer Handbook, 3rd ed. (Wiley, New York 1989)
18. A. Reiser: Photoreactive polymers: the science and technology of resists (Wiley, New York 1989)