Femtosecond laser drilling of alumina ceramic substrates

X. C. Wang; H. Y. Zheng; P. L. Chu; J. L. Tan; K. M. Teh; T. Liu; Bryden C. Y. Ang; G. H. Tay

doi:10.1007/s00339-010-5816-8

journal article·2010-11

Femtosecond laser drilling of alumina ceramic substrates

X. C. Wang, H. Y. Zheng, P. L. Chu, J. L. Tan, K. M. Teh, T. Liu, Bryden C. Y. Ang, G. H. Tay

Applied Physics A· Volume 101· Issue 2

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Source abstract

Abstract

In the paper, the result on femtosecond laser drilling of alumina ceramic substrate was reported. The effects of various laser parameters such as different focus position, traverse speed, drilling pattern, pausing time, etc. on the drilled hole quality in terms of surface finish, heat affected zone (HAZ), hole circularity, debris, microcracks were studied. The quality of laser-drilled holes on alumina ceramic substrates was evaluated with optical microscope, SEM/EDX, and X-ray μ-CT analysis. The optimum drilling conditions were identified. High-quality laser-drilled holes on alumina ceramic substrates were demonstrated. The developed process has potential application in manufacturing of alumina substrate based electronic devices.

Source: openaire · Quality: candidate unverified · Source record ↗

Research context

Ceramics & glasses

OpenAlex topics: Laser Material Processing Techniques · Advanced Surface Polishing Techniques · Advanced machining processes and optimization

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (12)

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