journal article·2003-01-01

Laser-induced nano-patterning by means of interference subpatterns generated by microspheres

R. Denk, K. Piglmayer, D. Bäuerle

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Abstract

Interference patterns generated by a regular lattice of SiO2 microspheres on a transparent support are used for the surface patterning of polyimide (PI) foils. Using 248 nm excimer-laser radiation, thousands to millions of holes with a full width at half maximum (FWHM) of 160±40 nm can be generated with a single laser pulse.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Laser Material Processing Techniques · Semiconductor Lasers and Optical Devices · Adhesion, Friction, and Surface Interactions

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