Surface cleaning using sputtering
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Abstract
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Research context
OpenAlex topics: Ion-surface interactions and analysis · Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research
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References (100+)
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1. H.E. Farnsworth, R.E. Schlier, T.H. George, R.M. Burger: J. Appl. Phys. 29, 1150 (1958)10.1063/1.1723393 ↗
2. F.P. Netzer, T.E. Madey: Phys. Rev. Lett. 13, 928 (1981)10.1103/PhysRevLett.47.928 ↗
3. R. Zeppenfeld, R. David, R.L. Palmer, G. Comsa: Phys. Rev. Lett. 57, 3187 (1986)10.1103/PhysRevLett.57.3187 ↗
4. A.G. Mathewson: Report CERN-ISR-VA/76-5 (1976)
5. O. Gröbner, A.G. Mathewson, H. Störi, P. Strubin: Vacuum 33, 397 (1983)10.1016/0042-207X(83)90659-0 ↗
6. H.F. Dylla: J. Nucl. Mater. 93/94, 61 (1980)10.1016/0022-3115(80)90303-7 ↗
7. H. Frey, G. Kienel (eds.): Dünnschichttechnologie (VDI Verlag, Düsseldorf 1987)
8. J. Fine, B. Navinsek: J. Vac. Sci. Technol. A 3, 1408 (1985)10.1116/1.572790 ↗
9. K. Wittmaak: J. Vac. Sci. Technol. A 3, 1350 (1985)10.1116/1.572775 ↗
10. M. Tarng, G.K. Wehner: J. Appl. Phys. 43, 2268 (1972)10.1063/1.1661490 ↗
11. R.G. Musket, W. McLean, C.A. Colmenares, D.M. Makowiecki, W.J. Siekhaus: Appl. Surf. Sci. 10, 143 (1982)10.1016/0378-5963(82)90142-8 ↗
12. D. Menzel: In Interactions on Metal Surfaces, ed. by R. Gomer (Springer, Berlin, Heidelberg 1975) p. 10110.1007/BFb0015587 ↗
13. A. Joshi: In Interface Segregation, ed. by W.C. Johnson, J.M. Blakely (Am. Soc. Metals, 1979) p. 39
14. J. Verhoeven: In Treatise of Clean Surface Technology, ed. by K.L. Mittal
15. E. Taglauer: Nucl. Fusion Special Issue (1984)
16. E. Taglauer, W. Heiland, J. Onsgaard: Nucl. Instrum. Methods 168, 571 (1980)10.1016/0029-554X(80)91312-9 ↗
17. A. Koma: IPPJ-AM 22 (1982)
18. E. Taglauer, G. Marin, W. Heiland: Appl. Phys. 13, 47 (1977)10.1007/BF00890719 ↗
19. H.F. Winters, E. Taglauer: Phys. Rev. B 35, 2174 (1987)10.1103/PhysRevB.35.2174 ↗
20. W. Heiland, W. Englert, E. Taglauer: J. Vac. Sci. Technol. 15, 419 (1978)10.1116/1.569585 ↗
21. A. Benninghoven: Z. Phys. 230, 403 (1970)10.1007/BF01394486 ↗
22. L. Laxhuber, H. Möhwald, M. Hashmi: Int. J. Mass Spectr. Ion Phys. 51, 93 (1983)10.1016/0020-7381(83)85031-1 ↗
23. G. Falcone, P. Sigmund: Appl. Phys. 25, 307 (1981)10.1007/BF00902988 ↗
24. P. Sigmund et al. (Round Robin): Nucl. Instrum. Meth. Phys. Res. B 36, 110 (1989)10.1016/0168-583X(89)90573-9 ↗
25. W. Eckstein: Computer Simulation of Ion-Solid Interaction, Springer Ser. Mater. Sci. Vol. 10 (Springer, Berlin, Heidelberg 1990)
26. S. Hofmann: Appl. Phys. 13, 205 (1977)10.1007/BF00882481 ↗
27. K. Wittmaak, F. Schulz: Thin Solid Films 52, 259 (1978)10.1016/0040-6090(78)90144-X ↗
28. H.F. Winters, P. Sigmund: J. Appl. Phys. 45, 4760 (1974)10.1063/1.1663131 ↗
29. E. Taglauer, U. Beitat: J Nucl. Meter. 111 & 112, 800 (1982)10.1016/0022-3115(82)90309-9 ↗
30. P. Sigmund: In Sputtering by Particle Bombardment I, ed. by R. Behrisch, Topics Appl. Phys. 47 (Springer, Berlin, Heidelberg 1981) p. 910.1007/3540105212_7 ↗
31. J. Lindhard, V. Nielsen, M. Scharff: K. Dansk. Vidensk. Selsk. Medd. 36, 10 (1968)
32. W. Eckstein: Nucl. Fusion Special Issue (1984)
33. Y. Yamamura, H. Kimura: Surf. Sci. 185, L 475 (1987)10.1016/S0039-6028(87)80603-9 ↗
34. H.H. Andersen, H. Bay: In Sputtering by Particle Bombardment I, ed. by R. Behrisch, Topics Appl. Phys. 47 (Springer, Berlin, Heidelberg 1981) p. 14510.1007/3540105212_9 ↗
35. P. Sigmund: Phys. Rev. 184, 383 (1969)10.1103/PhysRev.184.383 ↗
36. J. Bohdansky, J. Roth, H.L. Bay: J. Appl. Phys. 51, 2861 (1980)10.1063/1.327954 ↗
37. Ch. Steinbrüchel: Appl. Phys. A 36, 37 (1985)10.1007/BF00616458 ↗
38. O.C. Yonts, D.E. Harrison, Jr.: J. Appl. Phys. 31, 1583 (1960)10.1063/1.1735896 ↗
39. E.O. Rausch, E.W. Thomas: Nucl. Instrum. Methods 149, 511 (1978)10.1016/0029-554X(78)90918-7 ↗
40. R.J. MacDonald, E. Taglauer, W. Heiland: Appl. Surf. Sci. 5, 197 (1980)10.1016/0378-5963(80)90152-X ↗
41. M.T. Robinson, J.M. Torrens: Phys. Rev. B 9, 5008 (1974)10.1103/PhysRevB.9.5008 ↗
42. J.P. Biersack, L.G. Haggmark: Nucl. Instrum. Methods 174, 257 (1980)10.1016/0029-554X(80)90440-1 ↗
43. M.L. Roush, T.D. Andreadis, O.F. Goktepe: Radiat. Eff. 55, 119 (1981)10.1080/00337578108225473 ↗
44. T. Ishitani, R. Shimizu: Appl. Phys. 6, 241 (1975)10.1007/BF00883758 ↗
45. M.T. Robinson: In Sputtering by Particle Bombardment I, ed. by R. Behrisch, Topics Appl. Phys. 47 (Springer, Berlin, Heidelberg 1981) p. 129
46. W. Eckstein, J.P. Biersack: Appl. Phys. A 37, 95 (1985)10.1007/BF00618859 ↗
47. D.P. Jackson: Proc. Symp. Sputtering, eds. P. Varga, G. Betz, F.P. Viehböck (Inst. Allg. Physik, Vienna 1980) p. 2
48. H.H. Andersen: Nucl. Instr. Meth. Phys. Res. B 18, 321 (1987)
49. J.P. Biersack: Nucl. Instrum. Meth. Phys. Res. B 27, 21 (1987)10.1016/0168-583X(87)90005-X ↗
50. E. Taglauer, U. Beitat, G. Marin, W. Heiland: J. Nucl. Mater. 63, 193 (1976)10.1016/0022-3115(76)90325-1 ↗
51. D.P. Jackson: Radiat. Eff. 18, 1 (1973)10.1080/00337577308232120 ↗
52. K.A. Gschneider: Solid State Phys. 16, 275 (1964)10.1016/S0081-1947(08)60518-4 ↗
53. I. Toyoshima, G.A. Samorjai: Catal. Rev.-Sci. Eng. 19, 105 (1979)10.1080/03602457908065102 ↗
54. W. Möller, W. Eckstein: Nucl. Instrum. Methods B 2, 814 (1984)10.1016/0168-583X(84)90321-5 ↗
55. R. Bastasz, L.G. Haggmark: J. Nucl. Mater. 103 & 104, 499 (1981)10.1016/0022-3115(82)90647-X ↗
56. Proc. Symp. Sputt. Spitz, Austria 1986: Nucl. Instrum. Meth. Phys. Res. B 18 (1987)
57. J.W. Coburn: J. Vac. Sci. Technol. 13, 1037 (1979)10.1116/1.569056 ↗
58. H.H. Andersen: Appl. Phys. 18, 131 (1979)10.1007/BF00934407 ↗
59. K. Wittmaak: Vacuum 34, 119 (1984)10.1016/0042-207X(84)90115-5 ↗
60. E.V. Kornelsen: Radiat. Eff. 13, 227 (1972)10.1080/00337577208231184 ↗
61. A. Zamarrodian, S. Tougaard, S. Ignatiev: Phys. Rev. B 30, 3124 (1984)10.1103/PhysRevB.30.3124 ↗
62. U. Littmark, J.G. Ziegler: Handbook of Range Distribution for Energetic Ions in all Elements (Pergamon, New York 1980)
63. W. Möller: J. Nucl. Mater. 162?164, 138 (1989)10.1016/0022-3115(89)90264-X ↗
64. G. Carter, D.G. Armour, S.E. Donnelly: Radiat. Eff. 53, 143 (1986)10.1080/00337578008207113 ↗
65. M.P. Seah, C. Lea: Phil. Mag. 31, 627 (1975)10.1080/14786437508226543 ↗
66. R.L. Jacobson, G.K. Wehner: J. Appl. Phys. 36, 2674 (1965)10.1063/1.1714559 ↗
67. J.J. Bellina, H.E. Farnsworth: J. Vac. Sci. Technol. 9, 616 (1972)10.1116/1.1317734 ↗
68. W. Heiland, E. Taglauer: Radiat. Eff. 19, 1 (1973)10.1080/00337577308232207 ↗
69. J.M. Walls, A.D. Martin, H.N. Southworth: Surf. Sci. 50, 360 (1975)10.1016/0039-6028(75)90030-8 ↗
70. L.K. Verheij, J.A. Van den Berg, D.G. Armour: Surf. Sci. 122, 216 (1982)10.1016/0039-6028(82)90075-9 ↗
71. U. Littmark, W.O. Hofer: Nucl. Instrum. Methods 168, 329 (1980)10.1016/0029-554X(80)91274-4 ↗
72. R. Shimizu: Proc. 7th Int. Vac. Congr. 3rd Int. Conf. Sol. Surf., ed. by R. Dobrozemsky et al., Vienna (1977) Vol. II, P. 1417
73. E. Taglauer, W. Heiland, R.J. MacDonald: Surf. Sci. 90, 661 (1979)10.1016/0039-6028(79)90366-2 ↗
74. K. Morita, H. Morii, Y. Horino: Nucl. Instrum. Meth. Phys. Res. B 18, 407 (1987)
75. R. Kelly, J. Sanders: Surf. Sci. 57, 143 (1976)10.1016/0039-6028(76)90174-6 ↗
76. P. Sigmund: J. Appl. Phys. 50, 7261 (1979)10.1063/1.325807 ↗
77. Z.L. Liau, W.L. Brown, R. Homer, J.M. Poate: Appl. Phys. Lett. 30, 626 (1977)10.1063/1.89285 ↗
78. P. Varga, E. Taglauer: Nucl. Instrum. Meth. Phys. Res. B 2, 4 (1984)
79. G. Betz, G.K. Wehner: In Sputtering by Particle Bombardment II, ed. by R. Behrisch, Topics Appl. Phys. 52 (Springer, Berlin, Heidelberg 1983) p. 1110.1007/3-540-12593-0_2 ↗
80. E. Taglauer: Appl. Surf. Sci. 13, 80 (1982)10.1016/0378-5963(82)90018-6 ↗
81. G. Betz, P. Braun, W. Färber: J. Appl. Phys. 48, 1404 (1977)10.1063/1.323879 ↗
82. J. du Plessis, G. van Wyk, E. Taglauer: Surf. Sci. 220, 381 (1989)10.1016/0039-6028(89)90240-9 ↗
83. B. Baretzky, W. Möller, E. Taglauer: Nucl. Instrum. Meth. Phys. Res. B 18, 496 (1987)
84. R. Kelly: Nucl. Instrum. Meth. Phys. Res. B 18, 388 (1987)
85. R. Kelly: Surf. Interf. Anal. 7, 1 (1985)10.1002/sia.740070102 ↗
86. G. Carter, B. Navinsek, J.L. Whitton: In Sputtering by Particle Bombardment II, ed. by R. Behrisch, Topics Appl. Phys. 52 (Springer, Berlin, Heidelberg 1983) p. 291
87. B. Navinsek: Progr. Surf. Sci. 7, 49 (1976)10.1016/0079-6816(76)90001-0 ↗
88. G.K. Wehner: J. Vac. Sci. Technol. A 3, 1821 (1985)10.1116/1.573386 ↗
89. M. Bernheim, G. Slodzian: Int. J. Mass Spectrom. Ion Phys. 12, 93 (1973)10.1016/0020-7381(73)80090-7 ↗
90. W.O. Hofer, H. Liebl: Appl. Phys. 8, 359 (1975)10.1007/BF00898370 ↗
91. G. Binnig, H. Rohrer, Ch. Gerber, E. Weibel: Phys. Rev. Lett. 49, 57 (1982)10.1103/PhysRevLett.49.57 ↗
92. A.J. Brunner, M. Ringger, L. Rosenthaler, A. Stemmer, R. Wiesendanger, R. Riedinger, P. Oelhafen, H.-J. Güntherodt: Nucl. Instrum. Meth. Phys. Res. B 18, 644 (1987)
93. W. Heiland, E. Taglauer: Methods of Experimental Physics, Vol. 22, ed. by R.L. Park, M. Lagally (Academic, New York 1985)
94. H. Liebl, R.F.K. Herzog: J. Appl. Phys. 34, 2893 (1963)10.1063/1.1729826 ↗
95. K. Wittmaak: Adv. Mass Spectrom. 7 A, 758 (1978)
96. S. Brodetsky, B. Hodgson: Philos. Mag. 31, 478 (1916)10.1080/14786440508635523 ↗
97. R. Behrisch: Erg. Exakt. Naturwiss. 35, 295 (1964)
98. W. Poschenrieder, G. Staudenmaier, Ph. Staib: J. Nucl. Mater. 93 & 94, 322 (1980)10.1016/0022-3115(80)90342-6 ↗
99. M. Bourgeois, M. Bronet, J.C. Godot, F. Malthouse, A. Poncet: J. Vac. Sci. Technol. A 5, 2346 (1987)10.1116/1.574449 ↗
100. W. Poschenrieder: Impulse 134 (1987)