Excimer laser polymer ablation: twenty years on

Research and development in excimer laser polymer ablation has been actively pursued for some twenty years, driven by interest in the basic science as well as by numerous applications that have emerged for this high-resolution technique for material removal. This paper reviews some of the basic mechanistic aspects of the UV laser–polymer interaction as a prelude to dealing with practical matters related to polymer processing by ablation. Applications in micro-machining and potential areas for future research are briefly covered.