journal article·1998-03-01Open access

A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors

H.P. Lang, R. Berger, F. Battiston, J.-P. Ramseyer, E. Meyer, C. Andreoli, J. Brugger, P. Vettiger, M. Despont, T. Mezzacasa, L. Scandella, H.-J. Güntherodt, C. Gerber, J.K. Gimzewski

Abstract

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Research context

OpenAlex topics: Mechanical and Optical Resonators · Advanced Chemical Sensor Technologies · Advanced MEMS and NEMS Technologies

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