journal article·2025-08

Precise electronic structure analysis of inorganic thin films by highly optimized argon-gas-cluster ion-beam sputtering

Dong-Jin Yun, Yunseong Lee, Hangsook Lee, Jung Yeon Won, Euna Kim, JaeGwan Chung, Sahn Nahm

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OpenAlex topics: Ion-surface interactions and analysis · Semiconductor materials and devices · Thin-Film Transistor Technologies

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