Preface: Materials, metrology, and modeling for a future beyond CMOS technology
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Abstract
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Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Semiconductor materials and devices · Advancements in Photolithography Techniques · Integrated Circuits and Semiconductor Failure Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Nanometrics 1 , Hillsboro, Oregon 97124, USA
School of Nanoscience and Nanoengineering, University of North Carolina Greensboro 2 , Greensboro, North Carolina 27401, USA
Logic Technology Development, Intel Corporation 3 , Hillsboro, Oregon 97124, USA
References (12)
Show source-provided references
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