Reducing adhesion energy of micro-relay electrodes by ion beam synthesized oxide nanolayers
Source abstract
Abstract
Reduction in the adhesion energy of contacting metal electrode surfaces in nano-electro-mechanical switches is crucial for operation with low hysteresis voltage. We demonstrate that by forming thin layers of metal-oxides on metals such as Ru and W, the adhesion energy can be reduced by up to a factor of ten. We employ a low-energy ion-beam synthesis technique and subsequent thermal annealing to form very thin layers (∼2 nm) of metal-oxides (such as RuO2 and WOx) on Ru and W metal surfaces and quantify the adhesion energy using an atomic force microscope with microspherical tips.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Force Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis · Ion-surface interactions and analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Materials Science and Engineering, University of California, Berkeley, California 94720, USA
Materials Sciences Division and Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA
Axcelis Technologies, Beverly, Massachusetts 01915, USA
Funding
National Science Foundation (NSF)
References (27)
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