Effect of residual stress and microstructure on mechanical properties of sputter-grown Cu/W nanomultilayers
Source abstract
Abstract
The combination of the high wear resistance and mechanical strength of W with the high thermal conductivity of Cu makes the Cu/W system an attractive candidate material for heat sinks in plasma experiments and for radiation tolerance applications. However, the resulting mechanical properties of multilayers and coatings strongly depend on the microstructure of the layers. In this work, the mechanical properties of Cu/W nanomultilayers with different densities of internal interfaces are systematically investigated for two opposite in-plane stress states and critically discussed in comparison with the literature. Atomistic simulations with the state-of-the-art neural network potential are used to explain the experimental findings of Young’s modulus and hardness. The results suggest that the microstructure, specifically the excess free volume associated with porosity and interface disorder interconnected with the stress state, has a great impact on the mechanical properties, notably Young’s modulus of Cu/W nanomultilayers.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Microstructure and mechanical properties · Diamond and Carbon-based Materials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Joining Technologies and Corrosion 1 , Ueberlandstrasse 129, Duebendorf CH-8600,
Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures 2 , Feuerwerkerstrasse 39, Thun CH-3602,
Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Advanced Materials Processing 3 , Feuerwerkstrasse 39, Thun CH-3602,
National Centre for Computational Design and Discovery of Novel Materials MARVEL, Empa 4 , Feuerwerkstrasse 39, Thun CH-3602,
Funding
Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung · National Center of Competence in Research Materials’ Revolution: Computational Design and Discovery of Novel Materials
References (56)
Show source-provided references
1. Nanomaterials by design: A review of nanoscale metallic multilayers10.1088/1361-6528/ab803f ↗
2. Interfacial design for joining technologies: An historical perspective10.1007/s11665-014-0928-5 ↗
3. Reactive multilayers fabricated by vapor deposition: A critical review10.1016/j.tsf.2014.09.042 ↗
4. Concepts for the design of advanced nanoscale PVD multilayer protective thin films10.1016/j.jallcom.2008.08.133 ↗
5. Advanced materials for multilayer mirrors for extreme ultraviolet solar astronomy10.1364/ao.55.002126 ↗
6. High-energy phonon confinement in nanoscale metallic multilayers10.1103/physrevb.77.165410 ↗
7. The influence of interface roughness on electrical transport in nanoscale metallic multilayers10.1063/1.2058172 ↗
8. Radiation damage tolerant nanomaterials10.1016/j.mattod.2013.10.019 ↗
9. High-strength and thermally stable bulk nanolayered composites due to twin-induced interfaces10.1038/ncomms2651 ↗
10. Controlled ion beam sputter deposition of W/Cu/W layered films for microelectronic applications10.1116/1.577377 ↗
11. Diffusion barrier effects of transition metals for Cu/M/Si multilayers (M=Cr, Ti, Nb, Mo, Ta, W)10.1063/1.111875 ↗
12. Radiation tolerance of Cu/W multilayered nanocomposites10.1016/j.jnucmat.2011.03.030 ↗
13. Deposition and structure of W–Cu multilayer coatings by magnetron sputtering10.1088/0022-3727/36/21/018 ↗
14. Evaluating modulus and hardness enhancement in evaporated Cu/W multilayers10.1016/j.actamat.2006.07.043 ↗
15. Microstructure and mechanical properties of physical vapor deposited Cu/W nanoscale multilayers: Influence of layer thickness and temperature10.1016/j.tsf.2014.05.044 ↗
16. Effects of periods on the evolution of microstructure and mechanical properties of multilayered Cu-W films during thermal annealing10.1016/j.surfcoat.2019.125179 ↗
17. Length-scale-dependent deformation mechanism of Cu/X (X=Ru, W) multilayer thin films10.1016/j.msea.2016.03.126 ↗
18. Tensile and compressive stresses in Cu/W multilayers: Correlation with microstructure, thermal stability, and thermal conductivity10.1016/j.actamat.2022.118315 ↗
19. Stress tuning in sputter-grown Cu and W films for Cu/W nanomultilayer design10.1063/5.0088203 ↗
20. Microstructure-property control in functional materials by multilayer design10.2533/chimia.2022.223 ↗
21. Stress determination in textured thin films using X-ray diffraction10.1557/s0883769400041658 ↗
22. Stress analysis of polycrystalline thin films and surface regions by X-ray diffraction10.1107/s0021889804029516 ↗
23. Effect of the individual layer thickness on the transformation of Cu/W nano-multilayers into nanocomposites10.1016/j.mtla.2019.100400 ↗
24. Thermal stability of Cu/W nano-multilayers10.1016/j.actamat.2016.02.003 ↗
25. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments10.1557/jmr.1992.1564 ↗
26. Critical review of analysis and interpretation of nanoindentation test data10.1016/j.surfcoat.2005.03.018 ↗
27. Fast Parallel algorithms for short-range molecular dynamics10.1006/jcph.1995.1039 ↗
28. Machine learning potential for the Cu-W system
29. CellMatch: Combining two unit cells into a common supercell with minimal strain10.1016/j.cpc.2015.08.038 ↗
30. The effect of thermal treatment on the stress state and evolving microstructure of Cu/W nano-multilayers10.1063/1.4967992 ↗
31. X-ray diffraction analysis of the structure and residual stresses of W/Cu multilayers10.1016/j.surfcoat.2006.08.034 ↗
32. The structure of nearly coherent fcc: Bcc boundaries in a Cu–Cr alloy10.1016/0039-6028(72)90264-6 ↗
33. Effect of layer-thickness fluctuations on superlattice diffraction10.1103/physrevb.35.9337 ↗
34. Modeling of interface and internal disorder applied to XRD analysis of Ag-based nano-multilayers10.1021/acsami.8b02653 ↗
35. Results of the IUCr precision lattice-parameter project10.1107/s0365110x60002041 ↗
36. Gamma ray induced modifications in copper microwires synthesized using track-etched membrane10.1016/j.vacuum.2017.11.031 ↗
37. Structural refinement of superlattices from x-ray diffraction10.1103/physrevb.45.9292 ↗
38. Combined size and texture-dependent deformation and strengthening mechanisms in Zr/Nb nano-multilayers10.1016/j.actamat.2016.11.007 ↗
39. From solid solutions to fully phase separated interpenetrating networks in sputter deposited ‘immiscible’ W–Cu thin films10.1016/j.actamat.2015.07.050 ↗
40. The evolution of hardness in Cu-W alloy thin films10.1016/j.msea.2018.05.035 ↗
41. Mechanical and other properties of nanocrystalline materials10.1007/978-3-319-01815-7_47 ↗
42. Metastable crystalline and amorphous structures formed in the Cu–W system by vapor deposition10.1007/bf02657233 ↗
43. Nanoindentation studies of Cu–W alloy films prepared by magnetron sputtering10.1016/j.jallcom.2007.10.033 ↗
44. Deformation behavior of nanostructured metallic multilayers10.1002/1527-2648(200104)3:4<217::aid-adem217>3.3.co;2-x ↗
45. Length-scale-dependent deformation mechanisms in incoherent metallic multilayered composites10.1016/j.actamat.2005.06.025 ↗
46. Length-scale-dependent deformation and fracture behavior of Cu/X (X = Nb, Zr) multilayers: The constraining effects of the ductile phase on the brittle phase10.1016/j.actamat.2011.08.016 ↗
47. Structure and strength of multilayers10.1557/s0883769400051502 ↗
48. Six decades of the Hall–Petch effect – a survey of grain-size strengthening studies on pure metals10.1080/09506608.2016.1191808 ↗
49. Strength of nanoscale metallic multilayers10.1016/j.scriptamat.2017.04.009 ↗
50. Observation of body centered cubic Cu in Cu/Nb nanolayered composites10.1063/1.119611 ↗
51. Young’s modulus in nanostructured metals10.1515/ijmr-2003-0209 ↗
52. Vacancy formation during vapor deposition10.1016/s1359-6454(97)00156-0 ↗
53. Influence of porosity on Young’s modulus and Poisson’s ratio in alumina ceramics10.1016/s0955-2219(00)00314-9 ↗
54. Uncovering the origin of interface stress enhancement and compressive-to-tensile transition in immiscible nanomultilayers
55. Measuring the elastic properties of anisotropic materials by means of indentation experiments10.1016/0022-5096(94)90033-7 ↗
56. Measuring anisotropy in young’s modulus of copper using microcantilever testing10.1557/jmr.2009.0396 ↗