journal article·2014-04-01Open access

Growth strategies to control tapering in Ge nanowires

P. Periwal, T. Baron, P. Gentile, B. Salem, F. Bassani

APL Materials· Volume 2· Issue 4

Abstract

We report the effect of PH3 on the morphology of Au catalyzed Ge nanowires (NWs). Ge NWs were grown on Si (111) substrate at 400 °C in the presence of PH3, using vapor-liquid-solid method by chemical vapor deposition. We show that high PH3/GeH4 ratio causes passivation at NW surface. At high PH3 concentration phosphorous atoms attach itself on NW surface and form a self-protection coating that prevents conformal growth and leads to taper free nanostructures. However, in case of low PH3 flux the combination of axial and radial growth mechanism occurs resulting in conical structure. We have also investigated axial PH3-intrinsic junctions in Ge NWs. The unusual NW shape is attributed to a combination of catalyzed, uncatalyzed and diffusion induced growth.
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Research context

OpenAlex topics: Nanowire Synthesis and Applications · Photonic and Optical Devices · Advancements in Semiconductor Devices and Circuit Design

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Affiliations

CEA Grenoble 1 Laboratoire des Technologies de la Microelectronique (LTM), UMR 5129 CNRS-UJF, , 17 Rue des Martyrs, 38054 Grenoble, France

UMR-E, CEA/UJF-Grenoble 1 2 SiNaPs Laboratory SP2M, , INAC, 38054 Grenoble, France

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