Order within disorder: The atomic structure of ion-beam sputtered amorphous tantala (a-Ta2O5)
Source abstract
Abstract
Amorphous tantala (a-Ta2O5) is a technologically important material often used in high-performance coatings. Understanding this material at the atomic level provides a way to further improve performance. This work details extended X-ray absorption fine structure measurements of a-Ta2O5 coatings, where high-quality experimental data and theoretical fits have allowed a detailed interpretation of the nearest-neighbor distributions. It was found that the tantalum atom is surrounded by four shells of atoms in sequence; oxygen, tantalum, oxygen, and tantalum. A discussion is also included on how these models can be interpreted within the context of published crystalline Ta2O5 and other a-T2O5 studies.
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Research context
OpenAlex topics: Electronic and Structural Properties of Oxides · High-pressure geophysics and materials · Glass properties and applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Stanford University 1 E. L. Ginzton Laboratory, , Stanford, California 94305, USA
California Institute of Technology 2 LIGO Laboratory, , Pasadena, California 91125, USA
Stanford University 3 Department of Geological and Environmental Sciences, , Stanford, California 94305, USA
SLAC National Accelerator Laboratory 4 Stanford Synchrotron Radiation Lightsource, , Menlo Park, California 94025, USA
University of Glasgow 5 SUPA, School of Physics and Astronomy, , Glasgow G12 8QQ, United Kingdom
Funding
National Science Foundation
References (38)
Show source-provided references
1. Nat. Photonics · 2011 · 5 · 15810.1038/nphoton.2010.313 ↗
2. IEEE J. Quantum Electron. · 1995 · 31 · 170910.1109/3.406387 ↗
3. Phys. Rev. Lett. · 2004 · 93 · 25060210.1103/PhysRevLett.93.250602 ↗
4. Classical Quantum Gravity · 2010 · 27 · 08400610.1088/0264-9381/27/8/084006 ↗
5. J. Electrochem. Soc. · 1990 · 137 · 287610.1149/1.2087091 ↗
6. Mater. Sci. Eng., A · 2005 · 398 · 2810.1016/j.msea.2005.03.032 ↗
7. Classical Quantum Gravity · 2010 · 27 · 22502010.1088/0264-9381/27/22/225020 ↗
8. Classical Quantum Gravity · 2007 · 24 · 40510.1088/0264-9381/24/2/008 ↗
9. Acta Mater. · 2013 · 61 · 107010.1016/j.actamat.2012.10.009 ↗
10. Nucl. Instrum. Methods Phys. Res., Sect. A · 2007 · 582 · 24510.1016/j.nima.2007.08.119 ↗
11. Phys. Rev. B · 1998 · 58 · 756510.1103/PhysRevB.58.7565 ↗
12. Rev. Mineral. Geochem. · 2014 · 78 · 3310.2138/rmg.2014.78.2 ↗
13. J. Synchrotron Radiat. · 2005 · 12 · 53710.1107/S0909049505012719 ↗
14. Phys. Rev. B · 2002 · 66 · 22440510.1103/PhysRevB.66.224405 ↗
15. J. Synchrotron Radiat. · 2001 · 8 · 32210.1107/S0909049500016964 ↗
16. J. Phys.: Conf. Ser. · 2014 · 522 · 01204310.1088/1742-6596/522/1/012043 ↗
17. Acta Crystallogr. B · 2000 · 56 · 65910.1107/S0108768100005462 ↗
18. Russ. J. Inorg. Chem+ · 2003 · 48 · 464
19. Phys. Status Solidi B · 2013 · 250 · 164410.1002/pssb.201248577 ↗
20. Appl. Phys. Lett. · 2007 · 90 · 21190410.1063/1.2740172 ↗
21. J. Solid State Chem. · 1971 · 3 · 14510.1016/0022-4596(71)90018-1 ↗
22. J. Less-Common Met. · 1964 · 7 · 39710.1016/0022-5088(64)90036-0 ↗
23. Chem. Ber. · 1992 · 125 · 55110.1002/cber.19921250304 ↗
24. Acta Crystallogr. B · 1971 · 27 · 103710.1107/S056774087100342X ↗
25. Crystallogr. Rep. · 2002 · 47 · 41510.1134/1.1481927 ↗
26. Chem. - Eur. J. · 2013 · 19 · 1271110.1002/chem.201300777 ↗
27. Aust. J. Chem. · 2012 · 65 · 85110.1071/CH12080 ↗
28. Phys. Rev. Lett. · 2013 · 110 · 23550210.1103/PhysRevLett.110.235502 ↗
29. Appl. Phys. Lett. · 2011 · 98 · 03190410.1063/1.3535982 ↗
30. J. Mater. Chem. · 2000 · 10 · 188710.1039/b000947o ↗
31. J. Non-Cryst. Solids · 2013 · 378 · 15810.1016/j.jnoncrysol.2013.07.003 ↗
32. Phys. Rev. Lett. · 2014 · 112 · 15780110.1103/PhysRevLett.112.157801 ↗
33. J. Non-Cryst. Solids · 2014 · 405 · 110.1016/j.jnoncrysol.2014.08.022 ↗
34. Chem. Mater. · 2014 · 26 · 540110.1021/cm502689x ↗
35. Phys. Rev. B · 2013 · 87 · 02420110.1103/PhysRevB.87.024201 ↗
36. Phys. Rev. B · 1996 · 54 · 316910.1103/PhysRevB.54.3169 ↗
37. J. Alloy. Compd. · 2014 · 587 · 25110.1016/j.jallcom.2013.10.155 ↗
38. J. Phys. Chem. C · 2011 · 115 · 2365310.1021/jp2034104 ↗