journal article·2020-10-01Open access

Electronic interface and charge carrier density in epitaxial graphene on silicon carbide. A review on metal–graphene contacts and electrical gating

Sofia Aslanidou, Alberto García-García, Philippe Godignon, Gemma Rius

APL Materials· Volume 8· Issue 10

Abstract

For over 15 years, the number of studies on graphene electronics has not ceased growing. The rich physics, a set of outstanding properties, and the envisioned range of potential applications have consolidated graphene as a research field in its own. In this Research Update, we address a specific case of graphene for electronics, epitaxial graphene on silicon carbide (SiC) substrates. This paper mainly focuses on the electronic interface of graphene with metals. The first part of this paper describes the most characteristic aspects of the growth of epitaxial graphene on SiC wafers, and the main techniques for graphene material characterization are presented first. The main objective of this paper is to gather and discuss the most representative studies on the graphene–metal interface and the strategies employed to obtain low values for the contact resistances, which is a key feature for achieving the best performance of any graphene electronic devices. To benchmark developments in specifically epitaxial graphene on SiC, we include the results on mechanically exfoliated graphene from HOPG, as well as chemical vapor deposition graphene. In the last part of this paper, relevant device architectures for electrically gating graphene are briefly discussed.
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Research context

OpenAlex topics: Graphene research and applications · Advancements in Battery Materials · Semiconductor materials and devices

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Institute of Microelectronics of Barcelona, IMB-CNM, CSIC 1 , 08193 Bellaterra, Spain

Universitat Autònoma de Barcelona, UAB 2 , 08193 Bellaterra, Spain

Funding

Agència de Gestió d’Ajuts Universitaris i de Recerca · Ministerio de Ciencia, Innovación y Universidades · H2020 Marie Sklodowska-Curie Actions

References (99)

Show source-provided references
1. Science · 2019 · 363 · 105910.1126/science.aav1910 ↗
2. Nanoscale · 2015 · 7 · 459810.1039/c4nr01600a ↗
3. Nature · 2012 · 490 · 19210.1038/nature11458 ↗
4. Nat. Nanotechnol. · 2011 · 6 · 46410.1038/nnano.2011.125 ↗
5. J. Am. Chem. Soc. · 2011 · 133 · 281610.1021/ja109793s ↗
6. 2019
7. J. Phys. Chem. B · 2004 · 108 · 1991210.1021/jp040650f ↗
8. Solid State Commun. · 2007 · 143 · 9210.1016/j.ssc.2007.04.023 ↗
9. 2018
10. J. Phys. Chem. Solids · 2006 · 67 · 217210.1016/j.jpcs.2006.05.010 ↗
11. Science · 2006 · 312 · 119110.1126/science.1125925 ↗
12. Nat. Mater. · 2009 · 8 · 20310.1038/nmat2382 ↗
13. Appl. Phys. Lett. · 2009 · 95 · 22310810.1063/1.3266524 ↗
14. Appl. Phys. Express · 2010 · 3 · 07510210.1143/apex.3.075102 ↗
15. Nat. Nanotechnol. · 2010 · 5 · 18610.1038/nnano.2009.474 ↗
16. Towards electronic devices based on epigraphene10.1007/978-3-662-53908-8 ↗
17. Epigraphene: Epitaxial graphene on silicon carbide
18. Flat and safe under the graphene sheet10.1038/s41563-020-0666-z ↗
19. Production and processing of graphene and related materials10.1088/2053-1583/ab1e0a ↗
20. Science · 2010 · 327 · 66210.1126/science.1184289 ↗
21. Nano Lett. · 2013 · 13 · 295710.1021/nl401420s ↗
22. Science · 2011 · 332 · 129410.1126/science.1204428 ↗
23. 2D Mater. · 2014 · 1 · 02500410.1088/2053-1583/1/2/025004 ↗
24. Appl. Phys. Lett. · 2018 · 112 · 10350110.1063/1.5019435 ↗
25. Appl. Phys. Lett. · 2013 · 103 · 05351410.1063/1.4816762 ↗
26. Sci. Rep. · 2018 · 8 · 1501810.1038/s41598-018-33466-z ↗
27. J. Vac. Sci. Technol., B · 2010 · 28 · C5C110.1116/1.3420393 ↗
28. CrystEngComm · 2018 · 20 · 370210.1039/c8ce00383a ↗
29. ACS Nano · 2012 · 6 · 1089310.1021/nn304315z ↗
30. Nature · 1962 · 193 · 56910.1038/193569a0 ↗
31. Carbon · 1965 · 3 · 5310.1016/0008-6223(65)90027-8 ↗
32. Phys. Status Solidi B · 1997 · 202 · 3510.1002/1521-3951(199707)202:1<35::aid-pssb35>3.0.co;2-8 ↗
33. Fabrication of graphene by thermal decomposition of SiC
34. Appl. Surf. Sci. · 2013 · 284 · 19510.1016/j.apsusc.2013.07.080 ↗
35. Chapter 4—Aqueous cleaning and surface conditioning processes
36. Mater. Sci. Forum · 2012 · 717-720 · 87710.4028/www.scientific.net/msf.717-720.877 ↗
37. J. Phys. D: Appl. Phys. · 2012 · 45 · 15400110.1088/0022-3727/45/15/154001 ↗
38. Proc. SPIE · 2015 · 9552 · 95520Y10.1117/12.2191616 ↗
39. ACS Nano · 2010 · 4 · 15310.1021/nn901248j ↗
40. Surf. Sci. · 1975 · 48 · 46310.1016/0039-6028(75)90419-7 ↗
41. Carbon · 2013 · 51 · 24910.1016/j.carbon.2012.08.050 ↗
42. Nat. Nanotechnol. · 2010 · 5 · 72710.1038/nnano.2010.192 ↗
43. Sci. Rep. · 2014 · 4 · 455810.1038/srep04558 ↗
44. Phys. Rev. Lett. · 2009 · 103 · 24680410.1103/physrevlett.103.246804 ↗
45. Surf. Sci. · 2011 · 605 · 166210.1016/j.susc.2010.12.018 ↗
46. Appl. Phys. Lett. · 2011 · 99 · 12210610.1063/1.3643034 ↗
47. AIP Adv. · 2018 · 8 · 04501510.1063/1.5024132 ↗
48. J. Phys. D: Appl. Phys. · 2010 · 43 · 37400910.1088/0022-3727/43/37/374009 ↗
49. Phys. Rev. Appl. · 2017 · 8 · 04401110.1103/PhysRevApplied.8.044011 ↗
50. J. Phys. D: Appl. Phys. · 2010 · 43 · 37400410.1088/0022-3727/43/37/374004 ↗
51. Nano Lett. · 2011 · 11 · 178610.1021/nl200390e ↗
52. Phys. Rev. B · 2014 · 89 · 08542210.1103/physrevb.89.085422 ↗
53. J. Appl. Phys. · 2012 · 111 · 11430710.1063/1.4721673 ↗
54. Appl. Phys. Lett. · 2008 · 93 · 26310210.1063/1.3056655 ↗
55. J. Phys. D: Appl. Phys. · 2014 · 47 · 09401710.1088/0022-3727/47/9/094017 ↗
56. J. Mater. Res. · 2014 · 29 · 42610.1557/jmr.2013.261 ↗
57. J. Phys. D: Appl. Phys. · 2010 · 43 · 37401110.1088/0022-3727/43/37/374011 ↗
58. Proc. Natl. Acad. Sci. U. S. A. · 2011 · 108 · 1690010.1073/pnas.1105113108 ↗
59. Phys. Rev. B · 2009 · 80 · 12541010.1103/physrevb.80.125410 ↗
60. J. Vac. Sci. Technol., B · 2009 · 27 · 314910.1116/1.3250208 ↗
61. Carbon · 2012 · 50 · 302610.1016/j.carbon.2012.02.088 ↗
62. J. Appl. Phys. · 2012 · 112 · 10430710.1063/1.4765666 ↗
63. Appl. Phys. Lett. · 2009 · 95 · 20210110.1063/1.3263942 ↗
64. ACS Nano · 2010 · 4 · 110810.1021/nn901585p ↗
65. Science · 2013 · 342 · 83310.1126/science.1242988 ↗
66. Different contrast mechanisms in SEM imaging of graphene
67. Graphene on SiC: Chemico-physical characterization by XPS
68. Nanoscale electrical and structural properties of epitaxial graphene interface with SiC(0001)
69. Appl. Surf. Sci. · 2011 · 257 · 978510.1016/j.apsusc.2011.06.017 ↗
70. Rep. Prog. Phys. · 2012 · 75 · 05650110.1088/0034-4885/75/5/056501 ↗
71. J. Phys.: Conf. Ser. · 2017 · 816 · 01203210.1088/1742-6596/816/1/012032 ↗
72. Front. Mater. Sci. China · 2010 · 4 · 4510.1007/s11706-010-0014-3 ↗
73. Nat. Nanotechnol. · 2013 · 8 · 23510.1038/nnano.2013.46 ↗
74. 2011
75. Synthesis, characterization, and applications of graphene and derivatives
76. Nanotechnology · 2016 · 27 · 12570410.1088/0957-4484/27/12/125704 ↗
77. Phys. Rep. · 2009 · 473 · 5110.1016/j.physrep.2009.02.003 ↗
78. Appl. Spectrosc. Rev. · 2010 · 45 · 36910.1080/05704928.2010.483886 ↗
79. 2012
80. Nanoscale · 2013 · 5 · 407910.1039/c3nr00934c ↗
81. Micron · 2016 · 80 · 2010.1016/j.micron.2015.05.013 ↗
82. Diamond Relat. Mater. · 2015 · 54 · 6410.1016/j.diamond.2014.11.012 ↗
83. Carbon · 2019 · 149 · 40010.1016/j.carbon.2019.04.042 ↗
84. Crystals · 2017 · 7 · 21610.3390/cryst7070216 ↗
85. 2020
86. Int. J. High Speed Electron. Syst. · 2005 · 15 · 78110.1142/s0129156405003429 ↗
87. Processing and characterisation of ohmic contacts to silicon carbide
88. Materials · 2019 · 12 · 346810.3390/ma12213468 ↗
89. J. Electron. Mater. · 1997 · 26 · 11910.1007/s11664-997-0136-2 ↗
90. Adv. Condens. Matter Phys. · 2016 · 927370210.1155/2016/9273702 ↗
91. Solid-State Electron. · 2002 · 46 · 10910.1016/s0038-1101(01)00208-8 ↗
92. J. Appl. Phys. · 2015 · 118 · 03570510.1063/1.4927271 ↗
93. Sci. Rep. · 2017 · 7 · 510910.1038/s41598-017-05069-7 ↗
94. Appl. Phys. Lett. · 2009 · 94 · 10351110.1063/1.3095438 ↗
95. Phys. Rev. Lett. · 2008 · 101 · 02680310.1103/physrevlett.101.026803 ↗
96. J. Appl. Phys. · 2013 · 114 · 02450310.1063/1.4813216 ↗
97. Phys. Rev. B · 2009 · 79 · 24543010.1103/physrevb.79.245430 ↗
98. Carbon · 2018 · 127 · 49110.1016/j.carbon.2017.11.035 ↗
99. ACS Nano · 2014 · 8 · 64210.1021/nn405249n ↗