Progressive amorphization of GeSbTe phase-change material under electron beam irradiation
Abstract
Research context
OpenAlex topics: Phase-change materials and chalcogenides · Chemical and Physical Properties of Materials · Advanced Memory and Neural Computing
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Affiliations
Center for Advancing Materials Performance from the Nanoscale, State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University 1 , Xi’an 710049, China
The School of Chemistry and Chemical Engineering, Yulin University 2 , Yulin 719000, China
The School of Microelectronics, State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University 3 , Xi’an 710049, China
College of Materials Science and Engineering, Shenzhen University 4 , Shenzhen 518060, China
Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich GmbH 5 , 52425 Jülich, Germany
Funding
111 Project 2.0 · Major Provincial Basic Research Program of Guangdong · Science and Technology Foundation of Shenzhen · National Natural Science Foundation of China