journal article·2015-11Open access

Stress controlled pulsed direct current co-sputtered Al_1−xSc_xN as piezoelectric phase for micromechanical sensor applications

Simon Fichtner, Tim Reimer, Steffen Chemnitz, Fabian Lofink, Bernhard Wagner

APL Materials· Volume 3· Issue 11

Publisher page Open full text

Source abstract

Abstract

Identifying and overcoming the interface originating c-axis instability in highly Sc enhanced AlN for piezoelectric

Only a short abstract or summary was supplied by the source.

Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Acoustic Wave Resonator Technologies · Mechanical and Optical Resonators · Metal and Thin Film Mechanics

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Institute of Material Science, Christian-Albrechts-Universität, Kaiserstr. 2, 24143 Kiel, Germany

Fraunhofer Institute for Silicon Technology, Fraunhoferstr. 1, 25524 Itzehoe, Germany

Funding

Deutsche Forschungsgemeinschaft (DFG)

References (25)

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