journal article·2006-08-01

POSITRON ANNIHILATION AS A METHOD TO CHARACTERIZE POROUS MATERIALS

David W. Gidley, Hua-Gen Peng, Richard S. Vallery

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Abstract

▪ Abstract Beam-based positron annihilation spectroscopy (PAS) is a powerful porosimetry technique with broad applicability in the characterization of nanoporous thin films, especially insulators. Pore sizes and distributions in the 0.3–30 nm range are nondestructively determined with only the implantation of low-energy positrons from a table-top beam. Depth-profiling with PAS has proven to be an ideal way to measure the interconnection length of pores, search for depth-dependent inhomogeneities or damage in the pore structure, and explore porosity hidden beneath dense layers or diffusion barriers. The capability of PAS is rapidly maturing as new intense positron beams around the globe spawn more accessible PAS facilities. After a short primer on the physics of positrons in insulators, the various probe techniques of PAS are briefly summarized, followed by a more detailed discussion of the wide range of nanoporous film parameters that PAS can characterize.
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Research context

OpenAlex topics: Muon and positron interactions and applications · Graphene research and applications · Copper Interconnects and Reliability

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Physics, University of Michigan, Ann Arbor, Michigan 48109-1040;, ,

References (65)

Show source-provided references
1. 10.1166/jnn.2002.15110.1166/jnn.2002.151 ↗
2. 10.1103/RevModPhys.60.70110.1103/RevModPhys.60.701 ↗
3. 10.1016/S0079-6700(96)00023-810.1016/S0079-6700(96)00023-8 ↗
4. Gidley DW · 2001 · 151
5. 10.1021/jp013947b10.1021/jp013947b ↗
6. 10.12693/APhysPolA.107.71710.12693/APhysPolA.107.717 ↗
7. Charlton M, Humberston JW. 2001. Positron Physics. Cambridge, UK: Cambridge Univ. Press. 454pp.10.1017/CBO9780511535208 ↗
8. Mogensen OE · 1982 · 763
9. 10.12693/APhysPolA.107.62310.12693/APhysPolA.107.623 ↗
10. 10.1007/BF0205637910.1007/BF02056379 ↗
11. 10.1103/PhysRevLett.90.20340210.1103/PhysRevLett.90.203402 ↗
12. Schrader DM, Jean YC. 1988. Positron and positronium chemistry. Amsterdam: Elsevier. 395pp.
13. 10.1016/0301-0104(81)80307-210.1016/0301-0104(81)80307-2 ↗
14. 10.1063/1.167706710.1063/1.1677067 ↗
15. 10.1021/jp004182v10.1021/jp004182v ↗
16. Jasinska B · Opt. Appl. · 2003 · 33 · 7
17. 10.1142/371910.1142/3719 ↗
18. 10.1146/annurev.ms.10.080180.00214110.1146/annurev.ms.10.080180.002141 ↗
19. 10.1103/PhysRevLett.83.465810.1103/PhysRevLett.83.4658 ↗
20. 10.4028/www.scientific.net/MSF.363-365.54710.4028/www.scientific.net/MSF.363-365.547 ↗
21. 10.1016/S0169-4332(99)00214-710.1016/S0169-4332(99)00214-7 ↗
22. 10.1063/1.163438010.1063/1.1634380 ↗
23. 10.1021/jp983184110.1021/jp9831841 ↗
24. 10.1063/1.152692310.1063/1.1526923 ↗
25. 10.1103/PhysRevB.60.R515710.1103/PhysRevB.60.R5157 ↗
26. 10.1063/1.164492510.1063/1.1644925 ↗
27. 10.1016/S0009-2614(02)01369-610.1016/S0009-2614(02)01369-6 ↗
28. 10.1063/1.142109010.1063/1.1421090 ↗
29. 10.1142/9789812775610_000710.1142/9789812775610_0007 ↗
30. 10.1103/PhysRevB.71.18010210.1103/PhysRevB.71.180102 ↗
31. 10.4028/www.scientific.net/MSF.363-365.43010.4028/www.scientific.net/MSF.363-365.430 ↗
32. 10.1016/0010-4655(74)90070-810.1016/0010-4655(74)90070-8 ↗
33. 10.1016/0168-9002(96)00075-710.1016/0168-9002(96)00075-7 ↗
34. 10.1016/0168-9002(93)90286-Q10.1016/0168-9002(93)90286-Q ↗
35. 10.1016/0168-9002(90)90358-D10.1016/0168-9002(90)90358-D ↗
36. 10.1063/1.12600910.1063/1.126009 ↗
37. 10.1002/polb.1990.09028090210.1002/polb.1990.090280902 ↗
38. 10.12693/APhysPolA.107.72910.12693/APhysPolA.107.729 ↗
39. 10.1557/PROC-726-Q10.510.1557/PROC-726-Q10.5 ↗
40. 10.1557/PROC-863-B1.610.1557/PROC-863-B1.6 ↗
41. 10.1143/JJAP.43.24710.1143/JJAP.43.247 ↗
42. 10.1063/1.210340210.1063/1.2103402 ↗
43. 10.1149/1.156514010.1149/1.1565140 ↗
44. 10.1063/1.136070410.1063/1.1360704 ↗
45. 10.1063/1.150176710.1063/1.1501767 ↗
46. 10.1557/PROC-766-E10.810.1557/PROC-766-E10.8 ↗
47. 10.1063/1.188690510.1063/1.1886905 ↗
48. 10.1557/PROC-863-B3.110.1557/PROC-863-B3.1 ↗
49. Deleted in proof
50. 10.4028/www.scientific.net/MSF.445-446.45210.4028/www.scientific.net/MSF.445-446.452 ↗
51. 10.1103/PhysRevLett.87.06740210.1103/PhysRevLett.87.067402 ↗
52. 10.1016/S0169-4332(96)00971-310.1016/S0169-4332(96)00971-3 ↗
53. 10.1007/s00339020139810.1007/s003390201398 ↗
54. 10.1016/S0168-583X(00)00074-410.1016/S0168-583X(00)00074-4 ↗
55. 10.1016/S0169-4332(96)01052-510.1016/S0169-4332(96)01052-5 ↗
56. 10.1016/S0169-4332(02)00138-110.1016/S0169-4332(02)00138-1 ↗
57. 10.1016/S0169-4332(99)00166-X10.1016/S0169-4332(99)00166-X ↗
58. First Point Scientific, Inc. http://www.firstpsi.com
59. Hathaway AG. 2005. Design and testing of a prototype slow positron beam at the NC State University PULSTAR reactor. Masters thesis. North Carol. State Univ. 90pp.
60. 10.1063/1.150757810.1063/1.1507578 ↗
61. 10.1126/science.106958010.1126/science.1069580 ↗
62. 10.1557/mrs2005.16510.1557/mrs2005.165 ↗
63. 10.1063/1.200786210.1063/1.2007862 ↗
64. Dean KR · Abstr. Papers ACS · 2004 · 228 · U427
65. Zambov L, Weidner K, Shamamian V, Camilletti R, Pernisz U, et al. 2005. Advanced CVD silicon carbide barrier technology for protection from detrimental gases. 48th Annual Technical Conference Proceedings of the Society of Vacuum Coaters. In press