Modelling and experimental measurements of the mechanical response of piezoelectric structures from millimetre to micrometre
Source abstract
Abstract
Laser interferometry techniques have shown their ability to assess the mechanical response of a piezoelectric thin film. To support these investigations, a numerical study based on the finite element method is carried out: three-dimensional modelling of piezoelectric samples from bulk materials to thin films is examined. For each considered sample, a time-dependent analysis and a frequency domain study are performed. By performing time-dependent analysis, we obtain effective piezoelectric coefficient, d33, of the samples. The frequency domain study helps to calculate the frequency response of these samples. The calculated d33 values and the first frequency resonance values are then compared with the experimental data.
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Research context
OpenAlex topics: Acoustic Wave Resonator Technologies · Advanced MEMS and NEMS Technologies · Ultrasonics and Acoustic Wave Propagation
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
GREMAN, UMR CNRS 7347, INSA Centre Val de Loire, Blois, France
GREMAN, UMR CNRS 7347, Faculté des Sciences et Techniques, Université François-Rabelais, Tours, France
Funding
Région Centre-Val de Loire in the frame of the project ‘COMHET’
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