A Versatile Method for Nano‐Fabrication on Diamond Film: Flexible Diamond Metasurfaces as a Demonstration

Abstract Diamond exhibits unique performance across a wide range of applications due to its enormous presentable properties in electronic, photonic, and quantum fields. Yet heterogeneous integration of diamonds for on‐chip functionalities, like 2D materials, remains challenging due to the hard acquisition of scalable, transferable, and ultrathin diamond samples. Recently, edge‐exposed exfoliation is demonstrated as an effective way to produce wafer‐scale, freestanding, and ultrathin diamond films. However, the incompatibility of the newly developed diamond film with conventional nano‐fabrication methods makes it difficult to fabricate diamond film into practical devices. Herein, the mask‐transferring by sugar is demonstrated as a versatile method for pattern‐definition on diamond films, which shows satisfying geometrical resolution and accuracy comparing to conventional approaches. Additionally, based on this method, the flexible all‐diamond metasurfaces functioning as structural colors are achieved, which indicates its wide potential for fabricating more diamond‐related devices.