Compact Mid‐Infrared Spectrometer Using Continuously Variable Infrared Filter and Microbolometer Array for Simple and Fast Measurement of Molecular Mid‐IR Spectra

Abstract The mid‐infrared (mid‐IR) region is attractive for spectroscopy because this range has molecular fingerprint information. Existing FTIR‐based systems are limited by their complex optical systems, highlighting the ongoing necessity to advance miniaturization and simplify these systems. Here, a compact mid‐IR spectroscopy is introduced in the mid‐IR range, utilizing a continuously variable mid‐IR filter. This filter is made from Germanium (Ge) and BaF2 and is produced using physical vapor deposition. Continuously varying wavelengths of mid‐IR light are transmitted from different areas of the filter. These different wavelengths of light enter each pixel of the microbolometer array. Calibration is conducted using a sample material to match each pixel of the microbolometer array to its corresponding wavelength. Additionally, a deconvolution algorithm is applied to sharpen the acquired spectrum. This results in acquisition of high signal‐to‐noise ratio mid‐IR spectra in the LWIR region. Using this technology, mid‐IR spectroscopy for several types of samples like polymer film, and gas molecules is possible. In addition, by adopting total internal reflection, it is possible to measure non‐uniform thickness samples, such as liquid droplets.