Graphene‐Manipulated Terahertz Zigzag Electromagnetically Induced Transparency Metasurface on Liquid Crystal Polymer Film

Abstract Electromagnetically induced transparency (EIT) metasurfaces with enhanced light‐matter interactions offer promising prospects in applications of slow light, nonlinear optics, and sensitive sensing. Integrating active devices provides versatile dynamics in these EIT applications. Here, a new EIT structure, comprising a zigzag bright mode and two split‐ring resonator (SRR) dark modes, is designed on a low‐loss liquid crystal polymer (LCP) film for high terahertz (THz) transmission, and graphene is firstly wet‐transferred onto LCP for actively manipulating metasurfaces to the best of the authors’ knowledge, achieving a large modulation depth of 42%. Both theoretical analysis and full‐wave simulations are conducted to elucidate the mechanisms of the proposed structure with a large group delay of 16 ps and its dynamic graphene modulation. A prototype device integrated with patterned graphene is fabricated and characterized, whose measured spectra show good consistency with the theoretical and simulation data. The EIT transmittance peak is as high as 0.71 at 233 GHz, which is modulated from 0.45 to 0.26 with ion gel‐controlled graphene under a bias ranging from 0.2 to 2 V. This work paves a new way for graphene devices on flexible LCP films and provides a novel approach for THz devices with high transmission and active modulation.