From Two‐Photon Grayscale Lithography to Scalable Replication: Enabling Complex Aspherical Micro‐Optics for Mass Production
Abstract
Research context
OpenAlex topics: Nonlinear Optical Materials Studies · Nanofabrication and Lithography Techniques · Advanced optical system design
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Affiliations
Institute for Micro Integration (IFM) Faculty 7 — Engineering Design Production Engineering and Automotive Engineering University of Stuttgart Allmandring 9B 70569 Stuttgart Germany
Hahn‐Schickard Allmandring 9B 70569 Stuttgart Germany
4th Physics Institute and Research Center SCoPE University of Stuttgart Pfaffenwaldring 57 70569 Stuttgart Germany
Funding
HORIZON EUROPE European Research Council · HORIZON EUROPE European Innovation Council · Deutsche Forschungsgemeinschaft · Bundesministerium für Bildung und Forschung · Ministerium für Wissenschaft, Forschung und Kunst Baden-Württemberg · Baden-Württemberg Stiftung · Carl-Zeiss-Stiftung