Active Matrix Integrated Metasurface for 2D Electromagnetic Modulation

Abstract Reconfigurable metasurfaces have attracted widespread attention owing to their dynamic, multifunctional, and intelligent manipulation ability of electromagnetic waves. However, most previous reconfigurable meta‐devices work in one‐dimension (1D) due to the complex electrical wires and control circuits for two‐dimensional (2D) modulation. Here, an active matrix circuit composed of a MOSFET chip and a storage capacitor is introduced into the meta‐atom design to realize 2D control of reconfigurable metasurfaces. The number of the control circuits is reduced from M × N to M + N by applying sequential voltage and selecting the row/column. As proof of the scheme, a 10 × 10 active matrix integrated reconfigurable metasurface operating in X‐band is experimentally demonstrated. 2D beam scanning and point focusing with focal lengths of 60 mm & 120 mm are verified through 2D phase modulation. The scheme for 2D modulation has great potential in the construction of high‐frequency large‐scale compact reconfigurable metasurfaces and promises unprecedented progress for wireless telecommunication and microwave detection.