Tunable Mid‐Infrared Multi‐Resonant Graphene‐Metal Hybrid Metasurfaces

Abstract Electrically tunable graphene‐metal metasurfaces with controllable optical properties have attracted interest for straightforward manipulation of free space light. Their resonance tuning range depends on graphene's electrical transport characteristics, which are affected by its quality, operating conditions, and the device design. An important example of the latter is the direct contact of metallic antennas with the graphene layer that limits the extent to which a bias voltage can tune the metasurface's permittivity. In this work, this issue is resolved in a straightforward and fabrication‐efficient way for graphene‐metal hybrid metasurfaces with multiple plasmonic resonances. It is demonstrated that the incorporation of a 10 nm Al₂O₃ barrier layer enhances the tuning range of mid‐infrared resonances compared to metasurfaces without barrier layer, i.e., from 300 to 700 nm for a 7.3 µm resonance and from 110 to 140 nm for a 4.7 µm resonance. The improved tunability of the metal/dielectric/graphene metasurface can be attributed to the reduced electrical coupling between metal and graphene, as confirmed by an equivalent circuit model. These results bring closer the use of active metasurfaces based on two‐dimensional materials under ambient conditions, with possible applications as optical filters, modulators, and information processing devices that require dynamic control of light.