Arrays of Arbitrarily Shaped Nanoparticles: Overlay‐Errorless Direct Ion Write
Source abstract
Abstract
A simple solution to lithographically write down to 20–30 nm features over micrometer‐sized nanoparticle arrays with high fidelity of pattern transfer from the designed to fabricated architectures is shown. It is achieved via a two‐step approach: (i) fabrication of basic shape nanoparticles by electron beam lithography, gold deposition via sputtering and lift‐off, then (ii) nano‐patterning by focused ion beam lithography. Application potential of 3D tailored nanoparticles for nanotweezers is discussed on the basis of numerical modeling and experimental measurements of extinction.
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Research context
OpenAlex topics: Plasmonic and Surface Plasmon Research · Nanofabrication and Lithography Techniques · Ion-surface interactions and analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Centre for Micro‐Photonics Faculty of Engineering and Industrial Sciences Swinburne University of Technology Hawthorn VIC 3122 Australia
The Australian National Fabrication Facility – ANFF Victoria node Faculty of Engineering and Industrial Sciences Swinburne University of Technology Hawthorn VIC 3122 Australia
References (25)
Show source-provided references
1. 10.1002/adma.20060268010.1002/adma.200602680 ↗
2. 10.1038/nphoton.2011.5610.1038/nphoton.2011.56 ↗
3. 10.1038/nature0759310.1038/nature07593 ↗
4. 10.1021/jp305247a10.1021/jp305247a ↗
5. 10.1038/nphoton.2009.28210.1038/nphoton.2009.282 ↗
6. 10.1063/1.475222410.1063/1.4752224 ↗
7. 10.1021/nl203629m10.1021/nl203629m ↗
8. 10.1016/j.mee.2008.12.06110.1016/j.mee.2008.12.061 ↗
9. 10.1021/jp109099m10.1021/jp109099m ↗
10. 10.1002/smll.20050011310.1002/smll.200500113 ↗
11. 10.1002/smll.20050005010.1002/smll.200500050 ↗
12. 10.1016/j.mee.2004.12.00610.1016/j.mee.2004.12.006 ↗
13. 10.1364/OE.16.00567310.1364/OE.16.005673 ↗
14. 10.1021/jp901773k10.1021/jp901773k ↗
15. 10.1021/ja801262r10.1021/ja801262r ↗
16. 10.1021/jp068243m10.1021/jp068243m ↗
17. 10.1021/ja064578610.1021/ja0645786 ↗
18. 10.1063/1.222149910.1063/1.2221499 ↗
19. 10.1002/cssc.20080008710.1002/cssc.200800087 ↗
20. 10.1002/pssr.20110513610.1002/pssr.201105136 ↗
21. 10.1038/nphoton.2011.32210.1038/nphoton.2011.322 ↗
22. 10.1021/nl202447n10.1021/nl202447n ↗
23. 10.1002/pssr.20100422610.1002/pssr.201004226 ↗
24. 10.1039/c2nr32409a10.1039/c2nr32409a ↗
25. 10.2116/analsci.26.1310.2116/analsci.26.13 ↗