Direct Laser Writing for the Formation of Large‐Scale Gold Microbumps Arrays Generating Hybrid Lattice Plasmon Polaritons in Vis–NIR Range

Abstract Surface plasmon polaritons (SPPs) based light–matter interactions play a major role in photonic sensor applications. In order to implement such sensors in microchip devices or reduce the fabrication costs, a method with high flexibility and large‐scale capabilities must be developed. Here, the formation of large‐scale gold microbumps arrays by using a direct laser writing technique is presented. The fabricated arrays exhibit the hybrid lattice plasmon polaritons in the Vis–NIR range, in the same range as metallic gratings fabricated by lithography‐based techniques. The peak of hybrid lattice plasmon resonance depends on the period of the fabricated arrays, the thickness of the gold film, coupled light polarization, and sample orientation. The experimental results are in good agreement with the theoretical estimation. The demonstrated method shows relevant technological progress in the formation of large‐scale metallic gratings by using a cost‐effective laser‐based technique. It provides new opportunities for hybrid lattice plasmon polariton (HLPP)‐based applications in biotechnology, photonics, plasmonics, and so on.