journal article·2020-10Open access

Sensitive Photoresists for Rapid Multiphoton 3D Laser Micro‐ and Nanoprinting

Pascal Kiefer, Vincent Hahn, Martina Nardi, Liang Yang, Eva Blasco, Christopher Barner‐Kowollik, Martin Wegener

Advanced Optical Materials· Volume 8· Issue 19

Abstract

Abstract Driven by recent advances in rapid multiphoton single‐focus 3D laser nanoprinting, multifocus variants thereof, and projection‐based multiphoton 3D laser nanoprinting, the necessary average total laser powers from femtosecond laser oscillators or even from amplified femtosecond laser systems have exceeded the Watt level. Aiming at ever faster 3D printing, there exist two options: Using yet more powerful lasers or searching for more sensitive photoresists allowing for higher speeds at comparable or lower power levels. Here, altogether more than 70 different photoresists from the literature and a few new candidates are reviewed with regard to effective multiphoton sensitivity. A dimensionless sensitivity figure‐of‐merit allows to directly compare data taken under sometimes vastly different conditions.
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Research context

OpenAlex topics: Nonlinear Optical Materials Studies · Nanofabrication and Lithography Techniques · Laser Material Processing Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

3DMM2O‐Cluster of Excellence (EXC‐2082/1‐390761711) Karlsruhe Institute of Technology (KIT) and Heidelberg University Karlsruhe 76131 Germany

Institute of Applied Physics (APH) Karlsruhe Institute of Technology (KIT) Karlsruhe 76128 Germany

Institute of Nanotechnology (INT) Karlsruhe Institute of Technology (KIT) Karlsruhe 76128 Germany

Macromolecular Architectures Institute of Chemical Technology and Polymer Chemistry (ITCP) Karlsruhe Institute of Technology (KIT) Karlsruhe 76128 Germany

School of Chemistry and Physics Queensland University of Technology (QUT) 2 George Street Brisbane QLD 4000 Australia

Centre for Materials Science Queensland University of Technology (QUT) 2 George Street Brisbane QLD 4000 Australia

Funding

Deutsche Forschungsgemeinschaft · Carl-Zeiss-Stiftung · Australian Research Council

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