Multifunctional Hybrid Metasurfaces for Dynamic Tuning of Terahertz Waves

Abstract Actively tuning optical transmission through hybrid metasurfaces incorporated with multifunctional active media holds great promise for the next generation optical devices. In the terahertz (THz) range, they remain rare due to the lack of dynamic and multifunctional designs and materials. Here, a vanadium dioxide (VO₂)‐based hybrid metasurface is proposed to present multifunctional control of THz waves via electrically triggering and ultrafast optical excitation. By minimizing the thermal mass of VO₂ and optimizing the VO₂ patterns within two side gaps of the asymmetric split‐ring resonators, a hybrid metasurface which can tune the THz wave with an absolute modulation depth up to 54% and a figure of merit as high as 138% is hereby presented. The hybrid metasurface achieves a switching time of 2.2 s under the electrically triggering and offers an ultrafast modulation within 30 ps under the femtosecond pulse excitation. More interestingly, owing to the intrinsic hysteresis behavior of VO₂, the hybrid metasurface exhibits distinguishing multistate transmission amplitudes with a single electrical input. In short, this study paves the way for robust multifunctionality in electric‐controlled terahertz switching, photonic memory, and ultrafast terahertz optics.