Advanced Fabrication Strategies of Triboelectric Nanogenerators: MEMS, 3D Printing, and Textile Technology for Energy Harvesting Application

ABSTRACT The growing demand for clean and sustainable energy has positioned the triboelectric nanogenerator (TENG) as a promising technology for mechanical energy harvesting and self‐powered sensing. Due to its structural adaptability, TENG can be applied in diverse systems, including environmental monitoring, energy storage, portable power modules, and sensor networks. However, its overall performance and practicality are strongly influenced by the device architecture, which affects output efficiency, durability, fabrication complexity, and scalability. This review examines recent progress in TENG fabrication, with coverage of microelectromechanical systems (MEMS) technology, 3D printing, and textile‐based platforms. Strategies for performance enhancement, including hybrid approaches and surface modification methods, are discussed with attention to their effects on triboelectric output. Each fabrication route is compared based on electrical performance, design complexity, manufacturing time, scalability, and material versatility. The advantages and limitations of each fabrication approach are critically evaluated to provide a balanced assessment of their suitability for different application contexts. In addition, major limitations related to air breakdown, humidity effects, material degradation, and scale up are discussed with recent mitigation approaches. This review establishes a comparative framework to guide the design and optimization of TENG systems for energy harvesting and self‐powered sensing applications.