Optomechanical Cavities Based on Epitaxial GaP on Nominally (001)‐Oriented Si (Adv. Mater. Technol. 24/2024)
Source abstract
Abstract
Cavity Optomechanics In article number 2400525, Víctor J. Gómez and co-workers present the process of fabrication of a GaP optomechanical epitaxially grown on exact (001)-Si following a novel two-step dry-etching process. This suggests a simple and lowcost way to build GaP-based photonic devices directly integrated on Si(001) photonic wafers.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Advanced MEMS and NEMS Technologies · Mechanical and Optical Resonators · Geophysics and Sensor Technology
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Nanophotonics Technology Center Universitat Politècnica de València València 46022 Spain
Electronics and Semiconductors Group (ElySe) Applied Physics Department Universidad Autónoma de Madrid Madrid 28049 Spain
Departamento Fisica Aplicada I Universidad de Málaga Málaga 29071 Spain
References
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