DataVXAdvanced Materials TechnologiesPaper
journal article·2019-03Open access

Polymer Microelectromechanical Systems: Hydrogel Microelectromechanical System (MEMS) Resonators: Beyond Cost‐Effective Sensing Platform (Adv. Mater. Technol. 3/2019)

Yeowon Yoon, Inseok Chae, Thomas Thundat, Jungchul Lee

Advanced Materials Technologies· Volume 4· Issue 3
Publisher pageOpen full text
Source abstract

Abstract

In article number 1800597, Yeowon Yoon, Inseok Chae, and co-workers combine dynamic mask lithography and a dry-state “plugging-out” sacrificial process to manufacture suspended polyethylene glycol diacrylate (PEG-DA) microstructures. Obtained PEG-DA cantilevers and membranes can sense humidity and pressure.
Source: openalex_inverted_index · Quality: baseline

Research context

Polymers

OpenAlex topics: Synthesis and properties of polymers · Silicone and Siloxane Chemistry

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Affiliations

Department of Mechanical Engineering Sogang University Mapo‐gu 04107 Seoul Republic of Korea

Department of Chemical Engineering and Materials Research Institute Pennsylvania State University University Park PA 16802 USA

Department of Chemical and Materials Engineering University of Alberta Edmonton T6G 1H9 Alberta Canada

Department of Chemical and Biological Engineering University at Buffalo The State University of New York Amherst NY 14260‐4200 USA

Department of Mechanical Engineering Korea Advanced Institute of Science and Technology Yuseong‐gu 34141 Daejeon Republic of Korea

References

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