Fabrication of Photonic Resonators in Bulk 4H‐SiC
Source abstract
Abstract
Abstract The design and engineering of photonic architectures, suitable to enhance, collect and guide light on chip is needed for applications in quantum photonics and quantum optomechanics. In this work, a Faraday cage‐based oblique angle etch method is applied to fabricate various functional photonic devices from 4H Silicon Carbide (SiC)—a material that has attracted attention in recent years, due to its potential in optomechanics, nonlinear optics, and quantum information. The processing conditions are detailed and the geometrical and optical characteristics of the fabricated devices are thoroughly addressed. Employing photoluminescence measurements high‐quality factors are demonstrated for suspended microring resonators of up to 3500 in the visible range. Such devices will be applicable in the future to augment the properties of SiC in integrated on chip quantum photonics.
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Research context
OpenAlex topics: Photonic and Optical Devices · Advanced Fiber Laser Technologies · Diamond and Carbon-based Materials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Mathematical and Physical Sciences Faculty of inScience University of Technology Sydney Ultimo NSW 2007 Australia
ARC Centre of Excellence for Transformative Meta‐Optical Systems (TMOS) Faculty of Science University of Technology Sydney Ultimo NSW 2007 Australia
Department of Electrical and Electronic Engineering University of Melbourne Parkville VIC 3010 Australia
Division of Physics and Applied Physics School of Physical and Mathematical Sciences Nanyang Technological University Singapore 637371 Singapore
The Photonics Institute and Centre for Disruptive Photonic Technologies Nanyang Technological University Singapore 637371 Singapore
Funding
Australian Research Council
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