Nanoelectromechanical Systems: Straining and Tuning Atomic Layer Nanoelectromechanical Resonators via Comb‐Drive MEMS Actuators (Adv. Mater. Technol. 2/2021)
Source abstract
Abstract
In article number 2000794, Yong Xie, Philip X.-L. Feng, and co-workers demonstrate the additive and heterogeneous integration of 2D nanoelectromechanical systems (NEMS) onto micro actuators made of mainstream silicon-on-insulator (SOI) comb-drive microelectromechanical systems (MEMS), across several orders of magnitude in length scale, thus enabling a chip-scale platform for strain engineering of 2D crystals, and for broad frequency tuning and quality (Q) factor enhancement in atomically thin NEMS resonators.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Advanced MEMS and NEMS Technologies · Acoustic Wave Resonator Technologies · Mechanical and Optical Resonators
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Affiliations
Department of Electrical Engineering & Computer Science Case School of Engineering Case Western Reserve University Cleveland OH 44106 USA
Key Laboratory of Wide Band‐Gap Semiconductor Technology School of Advanced Materials and Nanotechnology Xidian University Xi'an 710071 China
Department of Electrical & Computer Engineering Herbert Wertheim College of Engineering University of Florida Gainesville FL 32611 USA
References
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