Direct Deposited Angstrom‐Scale Nanogap Electrodes with Macroscopically Measurable and Material‐Independent Capabilities for Various Applications

Abstract Nanogap electrodes (NGEs) with decreasing separations have received growing attention due to their potential in stimulating extensive applications with high scientific impact, including molecular electronics, quantum tunneling, plasmonic optics, and highly sensitive sequencing. Although various NGE‐manufacturing methods have been developed and offer promising results, angstrom‐scale NGEs have not been achieved without requiring sophisticated equipment, restricting materials or substrates, compromising mass‐fabrication compatibility, or/and failing to connect with macroscopic contacts. Here, macroscopically measurable and material‐independent NGEs with separations as low as to 6 angstroms have been achieved through a direct‐deposition technology that simultaneously addresses almost all of the issues mentioned above, highlighting the versatility of the formed NGEs, thus unlocking their full potential for application. The potential application in molecular electronics has been demonstrated experimentally. Importantly, the simple, low‐cost, lithography‐free and CMOS‐compatible fabrication technology will enable a breakthrough in NGE fabrication, enhancing the development of NGE‐related applications in various research fields.