journal article·2024-09Open access

On‐Chip THz Helical Antenna Based on Metal Self‐Rolled‐up Membrane Nanotechnology

Longyu Li, Wei He, Zhikun Zhou, Tao Yuan, Lei Sang, Yongfeng Mei, Xiaochen Chen, Wen Huang

Advanced Materials Technologies· Volume 9· Issue 18

Abstract

Abstract This paper demonstrates the on‐chip terahertz (THz) helical antenna based on metal self‐rolled‐up membrane (M‐SRuM) nanotechnology, which utilizes the residual stress in multilayer metal membrane deposited by electron beam (E‐beam) evaporation to provide the rolling force and to form the radiation body of the helical antenna. Precise design method is proposed based on multi‐physics modeling for mechanical and electrical analysis, and the two operating modes of on‐chip helical antenna are modeled and analyzed. The test results show that the normal mode of self‐rolled‐up THz helical antenna is able to operate at frequency as high as 0.223 THz with the corresponding impedance bandwidth of 13 GHz.
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Research context

OpenAlex topics: Plasmonic and Surface Plasmon Research · Molecular Communication and Nanonetworks · Antenna Design and Analysis

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Yangtze Delta Region Institute (Huzhou) University of Electronic Science and Technology of China Huzhou 313001 China

School of Microelectronics Hefei University of Technology Hefei 230601 China

China Academy of Information and Communications Technology Beijing 100191 China

Shenzhen Academy of Information and Communications Technology Shenzhen 518048 China

College of Electronics and Information Engineering Shenzhen University Shenzhen 518060 China

Department of Materials Science State Key Laboratory of ASIC and Systems Fudan University Handan Road Shanghai 200433 China

Funding

National Key Research and Development Program of China · National Natural Science Foundation of China

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