Stretchable Substrates with 3D Wave Patterned Surface for Enhanced Mechanical Stability of Indium Tin Oxide Electrodes

Abstract Flexible electronic devices have promising applications in many future technologies such as wearables, implantables, robotics, and displays. Among the distinct types of mechanical flexibility, stretchability stands as a significant challenge. A particularly demanding objective is the realization of a high‐performance transparent electrode that endures stretching and can be mass produced, all while avoiding additional restrictions on device density. In this work, it is demonstrated that a 3D wave patterned surface provides a threefold improved strain performance of deposited indium tin oxide electrodes, in a statistical comparison of 3D wave patterned and planar surfaces, where indium tin oxide electrodes are stretched to electrical failure. Moreover, this platform alleviates residual thin film stress, allowing for easier handling of the substrates. This study demonstrates the feasibility of attaining stretchability for upcoming electronic devices using a scalable platform that incorporates high‐performance transparent electrode materials using only conventional materials and fabrication steps.